Chemical and Environmental Engineering

Research Output 1978 2020

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Conference contribution
2018

Atomic layer deposition of tin below 600 k using n2h4

Hinckley, A. & Muscat, A. J., Jan 1 2018, Ultra Clean Processing of Semiconductor Surfaces XIV. Heyns, M., Meuris, M., Meuris, M. & Mertens, P. (eds.). Trans Tech Publications Ltd, p. 232-237 6 p. (Solid State Phenomena; vol. 282 SSP).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Titanium nitride
Tin
Atomic layer deposition
titanium nitrides
atomic layer epitaxy

Experimental study of hygroscopy of single and different mixtures of MgCl 2 , KCl, NaCl, ZnCl 2 for application as heat transfer fluids in CSP

Wang, X., Hu, Q., Kim, G. P., Xu, X., Li, P. & Gervasio, D. F., Jan 1 2018, Energy. American Society of Mechanical Engineers (ASME), (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); vol. 6B-2018).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Solar energy
Salts
Heat transfer
Fluids
Molten materials
2017

Investigation of properties of Kcl-Mgcl2 eutectic salt for heat transfer and thermal storage fluids in CSP systems

Wang, X., Xu, X., Elsentriecy, H., Gervasio, D. F., Li, P., Li, Y., Hao, Q. & Xiao, B., 2017, Heat Transfer Equipment; Heat Transfer in Multiphase Systems; Heat Transfer Under Extreme Conditions; Nanoscale Transport Phenomena; Theory and Fundamental Research in Heat Transfer; Thermophysical Properties; Transport Phenomena in Materials Processing and Manufacturing. American Society of Mechanical Engineers, Vol. 2. HT2017-4766

Research output: Chapter in Book/Report/Conference proceedingConference contribution

eutectics
Eutectics
corrosion
heat transfer
Salts

Speciation during wet etching of III-V semiconductors

Hinckley, A., Foster, E., Corley, T. & Muscat, A. J., Jan 1 2017, ECS Transactions. 2 ed. Electrochemical Society Inc., Vol. 80. p. 163-170 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wet etching
Arsenic
Vapors
Etching
Hydrolysis
1 Citation (Scopus)

Stability of SiGe(100) surfaces after ammonium sulfide passivation

Heslop, S. L., Peckler, L. & Muscat, A. J., Jan 1 2017, ECS Transactions. 2 ed. Electrochemical Society Inc., Vol. 80. p. 147-153 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Passivation
Acids
Sulfur
Defects
Oxides
2016
2 Citations (Scopus)

Comparison of the chemical passivation of GaAs, In0.53Ga0.47As, and InSb with 1-eicosanethiol

Contreras, Y., Mancheno-Posso, P. & Muscat, A. J., 2016, Ultra Clean Processing of Semiconductor Surfaces XIII. Trans Tech Publications Ltd, Vol. 255. p. 55-60 6 p. (Solid State Phenomena; vol. 255).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Passivation
passivity
Photoelectron spectroscopy
Lattice constants
Fourier transform infrared spectroscopy

Is there a need to act on contaminants of emerging concerns in your watershed? a management approach to assess and reduce risk for aquatic and human health

Rauch-Williams, T., Dickenson, E., Deslaurier, S., Drewes, J. E., Snyder, S. A. & Bieber, S., Jan 1 2016, WEFTEC 2016 - 89th Water Environment Federation Annual Technical Exhibition and Conference. Water Environment Federation, p. 4315-4321 7 p. (WEFTEC 2016 - 89th Water Environment Federation Annual Technical Exhibition and Conference; vol. 6).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Watersheds
cation exchange capacity
Managers
Health
watershed

Planarization with suspended polyurethane beads and a stiff counterface: Pad-in-a-bottle experiments and simulation

Boning, D., Fan, W., Zhuang, Y., Sampurno, Y. & Philipossian, A., Feb 17 2016, 2015 International Conference on Planarization/CMP Technology, ICPT 2015. Institute of Electrical and Electronics Engineers Inc., 7411978

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polyurethanes
Bottles
polycarbonate
Polishing
Oxides
2015
2 Citations (Scopus)

Characterization of cavitation in ultrasonic or megasonic irradiated gas saturated solutions using a hydrophone

Zhao, M., Balachandran, R., Madigappu, P. R., Yam, P., Zanelli, C., Sierra Alvarez, M. R. & Keswani, M. K., 2015, Solid State Phenomena. Trans Tech Publications Ltd, Vol. 219. p. 165-169 5 p. (Solid State Phenomena; vol. 219).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hydrophones
hydrophones
cavitation flow
Cavitation
ultrasonics

Chemical passivation of In0.53Ga0.47As(100) using ammonium sulfide and thiols

Contreras, Y. & Muscat, A. J., 2015, ECS Transactions. 8 ed. Electrochemical Society Inc., Vol. 69. p. 261-267 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Passivation
Oxides
X ray photoelectron spectroscopy
Substrates
Surface structure
7 Citations (Scopus)

New developments in ligand-stabilized metal oxide nanoparticle photoresists for EUV lithography

Ober, C., Jiang, J., Zhang, B., Li, L., Giannelis, E., Chun, J. S., Neisser, M. & Sierra-Alvares, R., Jan 1 2015, Extreme Ultraviolet (EUV) Lithography VI. Wood, O. R. & Panning, E. M. (eds.). SPIE, 942207. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9422).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

EUV Lithography
Extreme ultraviolet lithography
Photoresist
Photoresists
photoresists
6 Citations (Scopus)

Novel slurry injection system for improved slurry flow and reduced defects in CMP

Philipossian, A., Borucki, L., Sampurno, Y. & Zhuang, Y., 2015, Solid State Phenomena. Trans Tech Publications Ltd, Vol. 219. p. 143-147 5 p. (Solid State Phenomena; vol. 219).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

foams
Foams
injection
Defects
defects
3 Citations (Scopus)

Passivation of InSb(100) with 1-eicosanethiol self-assembled monolayers

Contreras, Y. & Muscat, A. J., 2015, Solid State Phenomena. Trans Tech Publications Ltd, Vol. 219. p. 59-62 4 p. (Solid State Phenomena; vol. 219).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Self assembled monolayers
Passivation
X ray photoelectron spectroscopy

Reaction mechanisms on binary III-V semiconductor surfaces during etching, passivation, and deposition

Muscat, A. J., 2015, ECS Transactions. 8 ed. Electrochemical Society Inc., Vol. 69. p. 217-226 10 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Passivation
Etching
Gases
Atoms
Oxides
1 Citation (Scopus)

Selective removal of native SiO2 Using XeF2

Hinckley, A., Mancheno, P., Lai, C. S. & Muscat, A. J., 2015, ECS Transactions. 7 ed. Electrochemical Society Inc., Vol. 69. p. 225-232 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photoelectron spectroscopy
X rays
Oxides
Atomic force microscopy
Heating
3 Citations (Scopus)

Surface chemistry of GaAs(100) and InAs(100) etching with tartaric acid

Mancheno-Posso, P. & Muscat, A. J., 2015, Solid State Phenomena. Trans Tech Publications Ltd, Vol. 219. p. 52-55 4 p. (Solid State Phenomena; vol. 219).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Indium arsenide
Hydrochloric Acid
Gallium arsenide
hydrochloric acid
Hydrochloric acid
2 Citations (Scopus)

Surface chemistry of III-V semiconductors after wet etching with HCl and H2O2

Mancheno-Posso, P. & Muscat, A. J., 2015, ECS Transactions. 8 ed. Electrochemical Society Inc., Vol. 69. p. 227-233 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wet etching
Surface chemistry
Etching
Acids
Oxidation
2 Citations (Scopus)

Surface cleaning of SiGe(100) and passivation of Ge(100) with aqueous ammonium sulfide

Heslop, S. L., Engesser, P., Okorn-Schmidt, H. & Muscat, A. J., 2015, ECS Transactions. 8 ed. Electrochemical Society Inc., Vol. 69. p. 287-293 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Surface cleaning
Passivation
X ray photoelectron spectroscopy
Spectroscopic ellipsometry
Contamination
2014
4 Citations (Scopus)

Comparison of slurry film distribution between a novel slurry injection system and conventional slurry application method

Zhuang, Y., Sampurno, Y., Wu, C., Wu, B., Mu, Y., Borucki, L., Philipossian, A. & Yang, R., 2014, ECS Transactions. 1 ed. Electrochemical Society Inc., Vol. 60. p. 625-631 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ultraviolet radiation
Dyes
Cameras

Leading institutional change through faculty support and engagement with administrators: Use of evidence based teaching practices

Burd, G. D., Tomanek, D. J., Blowers, P., Bolger, M. S., Cox, J., Elfring, L. K., Grubbs, E., Hunter, J., Johns, K. A., Lazos, L., Lysecky, R. L., Milsom, D., Novodvorsky, I. ., Pollard, J., Prather, E. E., Talanquer, V. A., Thamvichai, K., Tharp, H. S. & Wallace, C., 2014, Education Division 2014 - Core Programming Area at the 2014 AIChE Annual Meeting. AIChE, p. 509-517 9 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mass transfer model for gas-liquid system

Choi, J. & Blowers, P., 2014, Engineering Sciences and Fundamentals 2014 - Core Programming Area at the 2014 AIChE Annual Meeting. AIChE, Vol. 1. p. 491-504 14 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mass transfer
Liquids
Gases

Review of national & International management approaches for compounds of emerging concerns

Rauch-Williams, T., Bieber, S., Dagnino, S., Dickenson, E., Drewes, J. E., Letzel, T. & Snyder, S. A., Oct 1 2014, 87th Annual Water Environment Federation Technical Exhibition and Conference, WEFTEC 2014. Water Environment Federation, p. 1082-1094 13 p. (87th Annual Water Environment Federation Technical Exhibition and Conference, WEFTEC 2014; vol. 10).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

cation exchange capacity
European Union
Water
programme
water
2013

Aggressive diamond characterization and wear analysis during chemical mechanical planarization

Philipossian, A., Wu, C., Zhuang, Y., Liao, X., Jiao, Y., Sampurno, Y., Theng, S., Sun, F. & Naman, A., 2013, ECS Transactions. 1 ed. Vol. 52. p. 597-603 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chemical mechanical polishing
Diamonds
Wear of materials
Polishing
Microelectronics

Consistent professional skills development across longitudinal core courses: Placement outcomes and demonstration of ABET criteria

Blowers, P. & Sorooshian, A., 2013, Education Division 2013 - Core Programming Area at the 2013 AIChE Annual Meeting: Global Challenges for Engineering a Sustainable Future. AIChE, p. 284-285 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Demonstrations

Direct and indirect emissions from mobil air conditioner units in transportation by truck and rail

Blowers, P., Dougless, A., Gerwe, B., Mesta, A. & Rugel, C., 2013, Sustainable Engineering Forum 2013 - Core Programming Area at the 2013 AIChE Annual Meeting: Global Challenges for Engineering a Sustainable Future. AIChE, p. 411 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Trucks
Rails
Air

Direct and indirect emissions from mobil air conditioner units in transportation by truck and rail

Blowers, P., Dougless, A., Gerwe, B., Mesta, A. & Rugel, C., 2013, Environmental Division 2013 - Core Programming Area at the 2013 AIChE Annual Meeting: Global Challenges for Engineering a Sustainable Future. AIChE, p. 382 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Trucks
Rails
air
Air

Estimations of direct and indirect emissions from mobile air conditioner units in automobile transportation: The cool mile functional unit

Blowers, P., Alayedi, I., Dougless, A., Gerwe, B., Mesta, A., Rugel, C. & Wang, Y. Y., 2013, Environmental Division 2013 - Core Programming Area at the 2013 AIChE Annual Meeting: Global Challenges for Engineering a Sustainable Future. AIChE, p. 229 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Automobiles
automobile
air
Air

Estimations of direct and indirect emissions from mobile air conditioner units in automobile transportation: The cool mile functional unit

Blowers, P., Alayedi, I., Dougless, A., Gerwe, B., Mesta, A., Rugel, C. & Wang, Y. Y., 2013, Sustainable Engineering Forum 2013 - Core Programming Area at the 2013 AIChE Annual Meeting: Global Challenges for Engineering a Sustainable Future. AIChE, p. 272 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Automobiles
Air

Observed aerosol effects on marine cloud nucleation and supersaturation

Russell, L. M., Sorooshian, A., Seinfeld, J. H., Albrecht, B. A., Nenes, A., Leaitch, W. R., Macdonald, A. M., Ahlm, L., Chen, Y. C., Coggon, M., Corrigan, A., Craven, J. S., Flagan, R. C., Frossard, A. A., Hawkins, L. N., Jonsson, H., Jung, E., Lin, J. J., Metcalf, A. R., Modini, R. & 6 others, Mülmenstädt, J., Roberts, G. C., Shingler, T., Song, S., Wang, Z. & Wonaschütz, A., 2013, AIP Conference Proceedings. Vol. 1527. p. 696-701 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

supersaturation
aerosols
nucleation
smoke
ships
2 Citations (Scopus)

Self-assembly of alkanethiols to protect GaAs(100)

Mancheno-Posso, P. & Muscat, A. J., 2013, ECS Transactions. 6 ed. Electrochemical Society Inc., Vol. 58. p. 289-296 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Self assembly
Atoms
Spectroscopic ellipsometry
Chain length
Passivation

Technological advance and remaining challenges make biofuels from algae a reality

Ogden, K. L., 2013, 3rd International Congress on Sustainability Science and Engineering, ICOSSE 2013. AIChE, p. 532-545 14 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

biofuel
Biofuels
Algae
alga
7 Citations (Scopus)

Understanding chlorite, chlorate and perchlorate formation when generating hypochlorite using boron doped diamond film electrodes

Hubler, D. K., Baygents, J. C., Chaplin, B. P. & Farrell, J., 2013, ECS Transactions. 35 ed. Electrochemical Society Inc., Vol. 58. p. 21-32 12 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Diamond films
Boron
Electrodes
Diamonds
Chlorine
2012
2 Citations (Scopus)

Ensuring safe water through advanced oxidation and real-time sensors

Pepper, I. L., Sherchan, S. P., Miles, S. L., Clarke, B. O. & Snyder, S. A., 2012, 14th Water Distribution Systems Analysis Conference 2012, WDSA 2012. Vol. 2. p. 1273-1278 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

spore
sensor
oxidation
water
pollutant

Scenario planning for robust water supply infrastructure design

Woods, G. J., Ormerod, K. J., Bailey, C. J., Kang, D., Quintanar, D. R., Curley, E. F., Lansey, K. E., Scott, C. A. & Arnold, R. G., 2012, World Environmental and Water Resources Congress 2012: Crossing Boundaries, Proceedings of the 2012 Congress. p. 2838-2845 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

water supply
infrastructure
water
planning
sustainability

Solar membrane distillation

Corral, A. F., Karanikola, V., Mette, P., Messina, C., Jiang, H., Munich, C., Moravec, B., Shroads, A., Arnold, R. G. & Ela, W. P., 2012, AWWA/AMTA Membrane Technology Conference and Exposition 2012. p. 1053-1061 9 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

distillation
membrane
water
desalination
solar energy

Trace organic compound removal at Clark County - Lessons learned from an indirect potable (IPR) system

Drury, D. D., Dickenson, E., Rauch-Williams, T. & Snyder, S. A., Jan 1 2012, WEFTEC 2012 - 85th Annual Technical Exhibition and Conference. Water Environment Federation, p. 3837-3851 15 p. (WEFTEC 2012 - 85th Annual Technical Exhibition and Conference; vol. 6).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Disinfection
Organic compounds
disinfection
Ozone
organic compound

Tribological, thermal, and kinetic attributes of 300 vs. 450 mm chemical mechanical planarization processes

Jiao, Y., Liao, X., Wu, C., Zhuang, Y., Sampurno, Y., Philipossian, A., Theng, S. & Goldstein, M., 2012, ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings. p. 272-277 6 p. 6212910

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chemical mechanical polishing
Kinetics
Copper
Surface reactions
Lubrication
2011

A review of algae-based biofuel production: Sustainability and life cycle assessments

Canter, C., Handler, R., Young, C., Blowers, P. & Shonnard, D., Jan 1 2011, Sustainable Engineering Forum: Core Programming Topic at the 2011 AIChE Annual Meeting. AIChE, Vol. 1. p. 623-624 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

life cycle assessment
Biofuels
biofuel
Algae
Sustainable development

A review of algae-based biofuel production: Sustainability and life cycle assessments

Canter, C., Handler, R., Young, C., Blowers, P. & Shonnard, D., 2011, 11AIChE - 2011 AIChE Annual Meeting, Conference Proceedings.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Biofuels
Algae
Sustainable development
Life cycle
Biodiesel

Correlation of pad topography, friction force and removal rate during tungsten chemical mechanical planarization

Sampurno, Y., Rice, A., Zhuang, Y. & Philipossian, A., 2011, ECS Transactions. 1 ed. Vol. 34. p. 621-626 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chemical mechanical polishing
Topography
Tungsten
Friction
Polishing
1 Citation (Scopus)

Determining the fundamental kinetic parameters for rinsing and cleaning of hafnium-based high-k materials

Zamani, D., Keswani, M. K., Yan, J., Raghavan, S. & Shadman, F., 2011, ECS Transactions. 5 ed. Vol. 41. p. 45-50 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hafnium
Quartz crystal microbalances
Kinetic parameters
Cleaning
Desorption
4 Citations (Scopus)

Dynamic states of adhering cancer cells under shear flow in an antibody-functionalized microchannel

Zheng, X. J., Cheung, L. S. L., Jiang, L., Schroeder, J., Heimark, R. L., Baygents, J. C., Guzman, R. Z. & Zohar, Y., 2011, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). p. 849-852 4 p. 5734558

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shear flow
microchannels
Microchannels
antibodies
shear flow

Effect of slurry application/injection methods and polishing conditions on bow wave characteristics

Liao, X., Sampurno, Y., Zhuang, Y., Sudargho, F., Rice, A. & Philipossian, A., 2011, ECS Transactions. 1 ed. Vol. 34. p. 659-663 5 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polishing
Film thickness
Flow rate
Fluorescence
3 Citations (Scopus)

Environmentally friendly natural materials based photoacid generators for next generation photolithography

Cho, Y., Ouyang, C. Y., Krysak, M., Sun, W., Gamez, V., Sierra Alvarez, M. R. & Ober, C. K., 2011, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 7972. 79722A

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photoacid Generator
Photolithography
photolithography
generators
E-beam Lithography

Medium optimization for enhanced lipid production by chlorella protothecoides UTEX25

Cheng, K. C., Ren, M. & Ogden, K. L., Jan 1 2011, Fuels and Petrochemicals Division - Core Programming Topic at the 2011 AIChE Annual Meeting. AIChE, 1 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lipids

Medium optimization for enhanced lipid production by Chlorella protothecoides UTEX25

Cheng, K. C., Ren, M. & Ogden, K. L., Jan 1 2011, Sustainable Engineering Forum: Core Programming Topic at the 2011 AIChE Annual Meeting. AIChE, Vol. 1. p. 58-59 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lipids

Tribological and kinetical analysis of barrier metal polishing for next generation copper interconnects

Duyos-Mateo, R., Gu, X., Nemoto, T., Sugawa, S., Zhuang, Y., Sampurno, Y., Philipossian, A. & Ohmi, T., 2011, ECS Transactions. 1 ed. Vol. 34. p. 627-632 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polishing
Slurries
Copper
Metals
Indentation
1 Citation (Scopus)

Water management by optimizing distributed wastewater reclamation capacity

Woods, G., Kang, D., Eberle, D., Smith, J., Davis, S., Lansey, K. E. & Arnold, R. G., 2011, World Environmental and Water Resources Congress 2011: Bearing Knowledge for Sustainability - Proceedings of the 2011 World Environmental and Water Resources Congress. p. 3184-3189 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

decision support system
water management
infrastructure
wastewater
facility location
2010

Assessment of sampling protocols and analytical performance via interlaboratory comparison for PPCPs/EDCs

Vanderford, B., Drewes, J., Eaton, A., Guo, Y., Snyder, S. A., Ternes, T. & Wood, C., 2010, Water Quality Technology Conference and Exposition 2010. p. 2366-2403 38 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

interlaboratory comparison
sampling
PPCP
protocol

Characterization of performance and wear mechanism of diamond electrodes used for electrochemical oxidation of TCE

Chaplin, B. P., Farrell, J., Carlisle, J. & Zeng, H., 2010, ACS National Meeting Book of Abstracts.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Diamond
Electrochemical oxidation
Diamonds
Wear of materials
Electrodes