• 1067 Citations
  • 19 h-Index
1984 …2019
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Fingerprint Dive into the research topics where Anthony J Muscat is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 2 Similar Profiles
Etching Engineering & Materials Science
Carbon dioxide Engineering & Materials Science
Carbon Dioxide Chemical Compounds
Oxides Chemical Compounds
Gases Chemical Compounds
Atomic layer deposition Engineering & Materials Science
X ray photoelectron spectroscopy Engineering & Materials Science
Carbon Monoxide Chemical Compounds

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Research Output 1984 2019

  • 1067 Citations
  • 19 h-Index
  • 60 Article
  • 31 Conference contribution
  • 6 Editorial
  • 3 Chapter

Surfactant templated oriented 1-D nanoscale platinum and palladium systems on a modified silicon surface

Nizameev, I. R., Muscat, A. J., Motyakin, M. V., Grishin, M. V., Zakharova, L. Y., Nizameeva, G. R. & Kadirov, M. K., Feb 1 2019, In : Nano-Structures and Nano-Objects. 17, p. 1-6 6 p.

Research output: Contribution to journalArticle

Palladium
Silicon
Platinum
Surface-Active Agents
palladium

Atomic layer deposition of tin below 600 k using n2h4

Hinckley, A. & Muscat, A. J., Jan 1 2018, Ultra Clean Processing of Semiconductor Surfaces XIV. Heyns, M., Meuris, M., Meuris, M. & Mertens, P. (eds.). Trans Tech Publications Ltd, p. 232-237 6 p. (Solid State Phenomena; vol. 282 SSP).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Titanium nitride
Tin
Atomic layer deposition
titanium nitrides
atomic layer epitaxy

Farewell

Muscat, A. J., May 1 2018, In : IEEE Transactions on Semiconductor Manufacturing. 31, 2, 1 p.

Research output: Contribution to journalEditorial

Gas-Phase Wafer Cleaning Technology

Rotondaro, A. L. P. & Muscat, A. J., Mar 17 2018, Handbook of Silicon Wafer Cleaning Technology. Elsevier Inc., p. 305-377 73 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Cleaning
Gases
Surface reactions
Plasma sources
Ozone

Editorial 2016 Best Paper Award

Muscat, A. J., Nov 1 2017, In : IEEE Transactions on Semiconductor Manufacturing. 30, 4, 1 p., 8066416.

Research output: Contribution to journalEditorial