• 1673 Citations
  • 22 h-Index
1984 …2019
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Fingerprint Dive into the research topics where Ara Philipossian is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 18 Similar Profiles
Chemical mechanical polishing Engineering & Materials Science
Polishing Engineering & Materials Science
Copper Engineering & Materials Science
Friction Engineering & Materials Science
Cytidine Monophosphate Chemical Compounds
polishing Physics & Astronomy
wafers Physics & Astronomy
Oxides Chemical Compounds

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Research Output 1984 2019

  • 1673 Citations
  • 22 h-Index
  • 127 Article
  • 85 Conference contribution
  • 1 Chapter
  • 1 Editorial

Effect of conditioner type and downforce, and pad surface micro-texture on SiO 2 chemical mechanical planarization performance

McAllister, J., Stuffle, C., Sampurno, Y., Hetherington, D., Suarez, J. S., Borucki, L. & Philipossian, A., Apr 1 2019, In : Micromachines. 10, 4, 258.

Research output: Contribution to journalArticle

Open Access
Chemical mechanical polishing
Polishing
Textures
Friction

Inferences of slurry bow wave width from mean coefficient of friction and directivity in chemical mechanical planarization

Diaz, G., Sampurno, Y., Theng, S. & Philipossian, A., Jan 1 2019, In : ECS Journal of Solid State Science and Technology. 8, 5, p. P3018-P3021

Research output: Contribution to journalArticle

Open Access
Chemical mechanical polishing
Friction
Flow rate
Stick-slip
Polishing

Insights into tungsten chemical mechanical planarization: Part III. Mini-marathons and associated numerical simulations

Mariscal, J. C., McAllister, J., Sampurno, Y., Suarez, J. S., Borucki, L. & Philipossian, A., Jan 1 2019, In : ECS Journal of Solid State Science and Technology. 8, 5, p. P3190-P3194

Research output: Contribution to journalArticle

Open Access
Tungsten
Chemical mechanical polishing
Chemical vapor deposition
Computer simulation
Friction
1 Citation (Scopus)

Insights into tungsten chemical mechanical planarization: Part II. Effect of pad surface micro-texture on frictional, thermal and kinetic aspects of the process

Mariscal, J. C., McAllister, J., Sampurno, Y., Suarez, J. S., Borucki, L. & Philipossian, A., Jan 1 2019, In : ECS Journal of Solid State Science and Technology. 8, 5, p. P3175-P3184

Research output: Contribution to journalArticle

Open Access
Tungsten
Chemical mechanical polishing
Textures
Chemical vapor deposition
Kinetics
2 Citations (Scopus)

Insights into tungsten chemical mechanical planarization: Part I. Surface micro-texture evolution during pad break-in

Mariscal, J. C., McAllister, J., Sampurno, Y., Suarez, J. S., Borucki, L. & Philipossian, A., Jan 1 2019, In : ECS Journal of Solid State Science and Technology. 8, 5, p. P3091-P3097

Research output: Contribution to journalArticle

Open Access
Tungsten
Chemical mechanical polishing
Chemical vapor deposition
Textures
Confocal microscopy