• 1732 Citations
  • 23 h-Index
1984 …2019
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Fingerprint Dive into the research topics where Ara Philipossian is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 15 Similar Profiles
Chemical mechanical polishing Engineering & Materials Science
Polishing Engineering & Materials Science
Copper Engineering & Materials Science
Friction Engineering & Materials Science
Cytidine Monophosphate Chemical Compounds
polishing Physics & Astronomy
wafers Physics & Astronomy
Oxides Chemical Compounds

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Research Output 1984 2019

  • 1732 Citations
  • 23 h-Index
  • 130 Article
  • 84 Conference contribution
  • 1 Chapter
  • 1 Editorial
Open Access
Tungsten
Chemical mechanical polishing
Friction
Silicon Dioxide
Lubrication

Correlating removal rate to directivity in copper chemical mechanical planarization

McAllister, J., Dadashazar, H., Sampurno, Y., Kim, S. G., Park, D., Kwon, H., Lee, Y. & Philipossian, A., Jan 1 2019, In : ECS Journal of Solid State Science and Technology. 8, 11, p. P734-P739

Research output: Contribution to journalArticle

Chemical mechanical polishing
Copper
Lubrication
Stick-slip
Chemical mechanical polishing
Cobalt
Copper
Friction

Effect of conditioner type and downforce, and pad surface micro-texture on SiO 2 chemical mechanical planarization performance

McAllister, J., Stuffle, C., Sampurno, Y., Hetherington, D., Suarez, J. S., Borucki, L. & Philipossian, A., Apr 1 2019, In : Micromachines. 10, 4, 258.

Research output: Contribution to journalArticle

Open Access
Chemical mechanical polishing
Polishing
Textures
Friction

Inferences of slurry bow wave width from mean coefficient of friction and directivity in chemical mechanical planarization

Diaz, G., Sampurno, Y., Theng, S. & Philipossian, A., Jan 1 2019, In : ECS Journal of Solid State Science and Technology. 8, 5, p. P3018-P3021

Research output: Contribution to journalArticle

Open Access
Chemical mechanical polishing
Friction
Flow rate
Stick-slip
Polishing