• 1577 Citations
  • 20 h-Index
1977 …2018
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Impurities Engineering & Materials Science
Semiconductor materials Engineering & Materials Science
Moisture Engineering & Materials Science
Adsorption Engineering & Materials Science
Water Engineering & Materials Science
Gasification Engineering & Materials Science
Sorbents Engineering & Materials Science
Carbon Engineering & Materials Science

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Research Output 1977 2018

  • 1577 Citations
  • 20 h-Index
  • 91 Article
  • 32 Conference contribution
  • 2 Chapter

Algae-based sorbents for removal of gallium from semiconductor manufacturing wastewater

Li, M., Shadman, F. & Ogden, K. L. Jan 27 2018 (Accepted/In press) In : Clean Technologies and Environmental Policy. p. 1-9 9 p.

Research output: Contribution to journalArticle

Semiconductor device manufacture
Activated carbon treatment
Torsion testing
gallium
Ion exchange resins
cerium
arsenite
Cytotoxicity
Nanoparticles
Epithelial Cells

Gradient filling of copper in porous silicon using a non-contact electrochemical method

Zhao, M., Shadman, F. & Keswani, M. Jul 1 2018 In : Applied Surface Science. 445, p. 505-511 7 p.

Research output: Contribution to journalArticle

Porous silicon
Copper
Copper Sulfate
Etching
Current density
5 Citations
Semiconductors
Biological Assay
Toxicity
Poisons
Arsenic

Rinsing of high-aspect-ratio features on patterned wafers

Chiang, C. C., Kishore, J., Raghavan, S. & Shadman, F. Feb 1 2017 In : IEEE Transactions on Semiconductor Manufacturing. 30, 1, p. 60-68 9 p., 7586061

Research output: Contribution to journalArticle

high aspect ratio
Aspect ratio
wafers
surface reactions
cleaning