Fingerprint Fingerprint is based on mining the text of the persons scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

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Impurities Engineering & Materials Science
Semiconductor materials Engineering & Materials Science
Moisture Engineering & Materials Science
Adsorption Engineering & Materials Science
Water Engineering & Materials Science
Gasification Engineering & Materials Science
Sorbents Engineering & Materials Science
Carbon Engineering & Materials Science

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Research Output 1977 2018

  • 1516 Citations
  • 19 h-Index
  • 89 Article
  • 32 Conference contribution
  • 2 Chapter

Algae-based sorbents for removal of gallium from semiconductor manufacturing wastewater

Li, M., Shadman, F. & Ogden, K. L. Jan 27 2018 (Accepted/In press) In : Clean Technologies and Environmental Policy. p. 1-9 9 p.

Research output: Contribution to journalArticle

Semiconductor device manufacture
Activated carbon treatment
Torsion testing
Ion exchange resins
4 Citations
Biological Assay

Rinsing of high-aspect-ratio features on patterned wafers

Chiang, C. C., Kishore, J., Raghavan, S. & Shadman, F. Feb 1 2017 In : IEEE Transactions on Semiconductor Manufacturing. 30, 1, p. 60-68 9 p., 7586061

Research output: Contribution to journalArticle

high aspect ratio
Aspect ratio
surface reactions
activated carbon
Ionic strength
Silicon Dioxide
Activated carbon
1 Citations

Application of process simulation for comparison of contactless and conventional electrodeposition methods for 3D packaging

Zhao, M., Jakes, K., Luke, K., Kishore, J., Gouk, R., Verhaverbeke, S., Shadman, F. & Keswani, M. 2016 In : ECS Journal of Solid State Science and Technology. 5, 9, p. P483-P488

Research output: Contribution to journalArticle

Deposition rates