• 284 Citations
  • 9 h-Index
20062018
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Engineering & Materials Science

Cleaning
Cavitation
Sonoluminescence
Acoustics
Copper
Tantalum
Ammonium hydroxide
Acoustic fields
Hydrophones
Packaging
Ammonia
Peroxides
Silicon
Porous silicon
Electrodeposition
Eutectics
Polishing
Water
Adhesion
Chemical mechanical polishing
Acids
Quartz crystal microbalances
Surface active agents
Hafnium oxides
Nitrides
Semiconductor materials
Acoustic streaming
Hydrogen peroxide
Fused silica
Gold
Degradation
Etching
Transducers
Urea
Photomasks
Acoustic waves
Cyclic voltammetry
Gases
Foams
Electrochemical impedance spectroscopy
Desorption
Carbon dioxide
Irradiation
Oxides
Adsorption
Polysilicon
Deionized water
Metals
Photoresists
Metal ions

Chemical Compounds

Cleaning
Cavitation
Sonoluminescence
Copper
Silicon
Tantalum
Porous silicon
Ammonium Hydroxide
Hydroxyl Radical
Ammonia
Acoustics
Acoustic fields
Peroxides
Choline
Water
Electrodeposition
Hydrophones
Eutectics
Packaging
Surface-Active Agents
Carbon Monoxide
Chemical mechanical polishing
Oxides
Electric autotransformers
Spreaders
Acoustic streaming
Hydrogen Peroxide
Semiconductor materials
Carbon Dioxide
Degradation
Metals
Cyclic voltammetry
Urea
Electrochemical impedance spectroscopy
Gases
Current density
Microelectrodes
Deionized water
Fused silica
Photoresists
Adhesion
Etching
Gold
Impurities
Electrochemistry
Octoxynol
Deposition rates
Fluorides
Electrolytes
Scavenging

Physics & Astronomy

Aeronautics

cavitation flow

General

cleaning
wafers
damage
hydrophones
eutectics
bubbles
formulations
aqueous solutions
transducers
photomasks
acoustic frequencies
surfactants
sound fields
photoresists
scavenging
acoustic streaming
interactions
ultrasonics
blankets
quartz crystals

Chemistry and Materials

choline
peroxides
ammonia
water
hydroxyl radicals
chlorides
oxides
hydroxides
hydrogen peroxide
ureas
copper
carbon dioxide
tantalum nitrides
gold
iodates
hafnium oxides
solid surfaces
sulfonic acid
dissolved gases

Physics

acoustics
sonoluminescence
radiant flux density
impedance
electrolytes
visible spectrum

Aerospace Sciences

photoelectron spectroscopy
spectroscopy
cavities

Engineering

irradiation