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Engineering & Materials Science

Cleaning
Cavitation
Water
Sonoluminescence
Copper
Silicon
Temperature
Tantalum
Ammonia
Acoustics
Packaging
Peroxides
Ammonium hydroxide
Acids
Electrodeposition
Eutectics
Degradation
Metals
Polishing
Oxides
Gold
Acoustic waves
Adsorption
Semiconductor materials
Scanning electron microscopy
Acoustic fields
Nitrides
Hydrogen peroxide
Irradiation
Chemical mechanical polishing
Quartz crystal microbalances
Fused silica
Urea
Cyclic voltammetry
Desorption
Carbon dioxide
Silica
Etching
Metal ions
Electrochemical impedance spectroscopy
Polysilicon
Porous silicon
Hafnium oxides
Photomasks
Abrasives
Acoustic streaming
Photoresists
Electrochemistry
Deionized water
Slurries

Chemical Compounds

Cleaning
Cavitation
Water
Copper
Silicon
Hydroxyl Radical
Ammonia
Acoustics
Sonoluminescence
Peroxides
Tantalum
Choline
Electrodeposition
Eutectics
Degradation
Ammonium Hydroxide
Porous silicon
Oxides
Acoustic fields
Packaging
Metals
Gases
Hydrogen Peroxide
Impurities
Semiconductor materials
Scanning electron microscopy
Chemical mechanical polishing
Urea
Current density
Acoustic waves
Electrochemical impedance spectroscopy
Surface-Active Agents
Gold
X ray photoelectron spectroscopy
Metal ions
Acoustic streaming
Photoresists
Electrolytes
Microelectrodes
Deposition rates
Electrochemistry
Deionized water
Octoxynol
Scavenging
Hydrophones
Photomasks

Physics & Astronomy

General

cleaning
wafers
damage
bubbles
interactions
eutectics
formulations
aqueous solutions
photomasks
photoresists
industries
scavenging
sound fields
blankets
quartz crystals

Aeronautics

cavitation flow

Chemistry and Materials

water
ammonia
oxides
peroxides
copper
choline
chlorides
hydroxides
hydroxyl radicals
hydrogen peroxide
ureas
carbon dioxide
gold
silicon
solid surfaces
potassium
tantalum nitrides
iodates
hafnium oxides
sulfonic acid
silicon nitrides

Physics

acoustics
sonoluminescence
impedance
radiant flux density
electrolytes
visible spectrum

Aerospace Sciences

spectroscopy
cavities
photoelectron spectroscopy

Engineering

packaging
electrodeposition