• 281 Citations
  • 9 h-Index
20062018
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Research Output 2006 2018

  • 281 Citations
  • 9 h-Index
  • 44 Article
  • 16 Conference contribution
  • 3 Chapter
  • 1 Review article
2018

Gradient filling of copper in porous silicon using a non-contact electrochemical method

Zhao, M., Shadman, F. & Keswani, M. Jul 1 2018 In : Applied Surface Science. 445, p. 505-511 7 p.

Research output: Contribution to journalArticle

Porous silicon
Copper
Copper Sulfate
Etching
Current density

Integrated circuit packaging review with an emphasis on 3D packaging

Lancaster, A. & Keswani, M. Jan 1 2018 In : Integration, the VLSI Journal. 60, p. 204-212 9 p.

Research output: Contribution to journalReview article

Integrated circuits
Packaging
Mechanical stability
Environmental protection
Temperature control
Alkanesulfonates
Spreaders
Transducers
Acoustics
foams
1 Citations

Treatment of perfluorooctane sulfonic acid (PFOS) using a large-scale sonochemical reactor

Gole, V. L., Fishgold, A., Sierra-Alvarez, R., Deymier, P. & Keswani, M. Apr 3 2018 In : Separation and Purification Technology. 194, p. 104-110 7 p.

Research output: Contribution to journalArticle

Fluorides
Acids
Sulfates
Ions
Fluorination
2016

Acoustic characterization of two megasonic devices for photomask cleaning

Zanelli, C., Giridhar, D., Keswani, M., Okada, N., Hsu, J. & Yam, P. 2016 Photomask Technology 2016. SPIE, Vol. 9985, 998524

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations

Application of process simulation for comparison of contactless and conventional electrodeposition methods for 3D packaging

Zhao, M., Jakes, K., Luke, K., Kishore, J., Gouk, R., Verhaverbeke, S., Shadman, F. & Keswani, M. 2016 In : ECS Journal of Solid State Science and Technology. 5, 9, p. P483-P488

Research output: Contribution to journalArticle

Electrodeposition
Packaging
Copper
Silicon
Deposition rates

Brush Scrubbing for Post-CMP Cleaning

Sun, T., Han, Z. & Keswani, M. Nov 11 2016 Methods for Surface Cleaning. Elsevier Inc., Vol. 9, p. 109-133 25 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Chemical mechanical polishing
Brushes
Cleaning
Polyvinyl Alcohol
Polyvinyl alcohols

Characterization of cavitation in a single wafer or photomask cleaning tool

Chen, X., Yam, P., Keswani, M., Okada, N. & Zanelli, C. I. 2016 Ultra Clean Processing of Semiconductor Surfaces XIII. Trans Tech Publications Ltd, Vol. 255, p. 207-212 6 p. (Solid State Phenomena; vol. 255)

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photomasks
photomasks
cavitation flow
Cavitation
cleaning

Characterization of Stable and Transient Cavitation in a Dual-Frequency Acoustic Field Using a Hydrophone

Zhao, M., Alobeidli, A., Chen, X., Yam, P., Zanelli, C. & Keswani, M. Jan 1 2016 In : MRS Advances. 1, 31, p. 2247-2253 7 p.

Research output: Contribution to journalArticle

Hydrophones
acoustic frequencies
hydrophones
Acoustic fields
cavitation flow
8 Citations

Effect of chemical structure on the sonochemical degradation of perfluoroalkyl and polyfluoroalkyl substances (PFASs)

Fernandez, N. A., Rodriguez-Freire, L., Keswani, M. & Sierra-Alvarez, R. Nov 1 2016 In : Environmental Science: Water Research and Technology. 2, 6, p. 975-983 9 p.

Research output: Contribution to journalArticle

Degradation
degradation
Chain length
sulfonate
Atoms
1 Citations

Fabrication of Radially Symmetric Graded Porous Silicon using a Novel Cell Design

Zhao, M. & Keswani, M. Apr 22 2016 In : Scientific Reports. 6, 24864

Research output: Contribution to journalArticle

Porous silicon
Octoxynol
Pore size
Fabrication
Silicon

Giant frequency down-conversion of the dancing acoustic bubble

Deymier, P. A., Keswani, M., Jenkins, N., Tang, C. & Runge, K. Nov 18 2016 In : Scientific Reports. 6, 37385

Research output: Contribution to journalArticle

bubbles
acoustics
standing waves
oscillations
Mathieu function

Investigation of Acoustic Cavitation in Aqueous Surfactant Solutions for Cleaning Applications

Zhao, M., Alobeidli, A., Chen, X., Yam, P., Zanelli, C., Maraviov, S., Nagel, M., Shadman, F. & Keswani, M. Jan 1 2016 In : MRS Advances. 1, 31, p. 2255-2260 6 p.

Research output: Contribution to journalArticle

cavitation flow
Cavitation
Surface-Active Agents
cleaning
Cleaning
3 Citations

Sonochemical degradation of perfluorinated chemicals in aqueous film-forming foams

Rodriguez-Freire, L., Abad-Fernández, N., Sierra-Alvarez, R., Hoppe-Jones, C., Peng, H., Giesy, J. P., Snyder, S. & Keswani, M. Nov 5 2016 In : Journal of Hazardous Materials. 317, p. 275-283 9 p.

Research output: Contribution to journalArticle

Fluorocarbons
foam
Foams
Carbon
Dilution
1 Citations

Sono-electrochemical recovery of metal ions from their aqueous solutions

Dong, B., Fishgold, A., Lee, P., Runge, K., Deymier, P. & Keswani, M. Nov 15 2016 In : Journal of Hazardous Materials. 318, p. 379-387 9 p.

Research output: Contribution to journalArticle

Metal recovery
Metal ions
Gallium
aqueous solution
Metals
3 Citations

The formation mechanism of gradient porous Si in a contactless electrochemical process

Zhao, M., McCormack, A. & Keswani, M. 2016 In : Journal of Materials Chemistry C. 4, 19, p. 4204-4210 7 p.

Research output: Contribution to journalArticle

Porous silicon
Current density
Silicon
Surface-Active Agents
Surface active agents
9 Citations

Understanding acoustic cavitation for sonolytic degradation of p-cresol as a model contaminant

Balachandran, R., Patterson, Z., Deymier, P., Snyder, S. A. & Keswani, M. Mar 1 2016 In : Chemosphere. 147, p. 52-59 8 p.

Research output: Contribution to journalArticle

cavitation
hydroxyl radical
Cavitation
Hydroxyl Radical
acoustics
2015
2 Citations

Characterization of cavitation in ultrasonic or megasonic irradiated gas saturated solutions using a hydrophone

Zhao, M., Balachandran, R., Madigappu, P. R., Yam, P., Zanelli, C., Sierra, R. & Keswani, M. 2015 Solid State Phenomena. Trans Tech Publications Ltd, Vol. 219, p. 165-169 5 p. (Solid State Phenomena; vol. 219)

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electric autotransformers
Hydrophones
hydrophones
cavitation flow
Cavitation
5 Citations

Characterization of stable and transient cavitation in megasonically irradiated aqueous solutions

Balachandran, R., Zhao, M., Yam, P., Zanelli, C. & Keswani, M. Feb 5 2015 In : Microelectronic Engineering. 133, p. 45-50 6 p.

Research output: Contribution to journalArticle

cavitation flow
Cavitation
aqueous solutions
cleaning
Cleaning
4 Citations

Contactless bottom-up electrodeposition of nickel for 3D integrated circuits

Zhao, M., Balachandran, R., Patterson, Z., Gouk, R., Verhaverbeke, S., Shadman, F. & Keswani, M. 2015 In : RSC Advances. 5, 56, p. 45291-45299 9 p.

Research output: Contribution to journalArticle

Nickel
Electrodeposition
Silicon
Deposition rates
Metals
13 Citations

Effect of sound frequency and initial concentration on the sonochemical degradation of perfluorooctane sulfonate (PFOS)

Rodriguez-Freire, L., Balachandran, R., Sierra-Alvarez, R. & Keswani, M. Dec 1 2015 In : Journal of Hazardous Materials. 300, p. 662-669 8 p.

Research output: Contribution to journalArticle

sulfonate
Acoustic waves
Degradation
degradation
saturation
4 Citations

Investigations of solution variables in a contactless copper electrodeposition process for 3D packaging applications

Weber, C., Patterson, Z., Zhao, M., Balachandran, R., Gouk, R., Verhaverbeke, S., Shadman, F. & Keswani, M. 2015 In : Materials Science in Semiconductor Processing. 30, p. 578-584 7 p.

Research output: Contribution to journalArticle

packaging
Electrodeposition
electrodeposition
Copper
Packaging
1 Citations

Megasonic Cleaning for Particle Removal

Keswani, M., Balachandran, R. & Deymier, P. Feb 6 2015 Particle Adhesion and Removal. wiley, p. 243-279 37 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Cleaning
Cavitation
Acoustic streaming
Acoustic fields
Liquids

Nanoparticle Adhesion and Removal

Keswani, M. Sep 3 2015 In : Particulate Science and Technology. 33, 5, p. 522-523 2 p.

Research output: Contribution to journalArticle

Adhesion
Nanoparticles
4 Citations

Synthesis of porous silicon through interfacial reactions and measurement of its electrochemical response using cyclic voltammetry

Zhao, M., Balachandran, R., Allred, J. & Keswani, M. Sep 7 2015 In : RSC Advances. 5, 96, p. 79157-79163 7 p.

Research output: Contribution to journalArticle

Porous silicon
Surface chemistry
Cyclic voltammetry
Silicon
Anodic polarization
2014
3 Citations
Sonoluminescence
Hydroxyl Radical
Gases
Ammonium Hydroxide
Ammonium hydroxide
4 Citations
Tantalum
Cleaning
Argon
Electrochemistry
Silicon Dioxide
3 Citations
cavitation flow
Bubbles (in fluids)
Cavitation
cleaning
Cleaning
3 Citations

Enhanced megasonic processing of wafers in MegPie® using carbonated ammonium hydroxide solutions

Kumari, S., Keswani, M., Singh, S., Beck, M., Liebscher, E. & Raghavan, S. Feb 2014 In : Microelectronic Engineering. 114, p. 148-153 6 p.

Research output: Contribution to journalArticle

Ammonium Hydroxide
Ammonium hydroxide
hydroxides
Cleaning
Cavitation
4 Citations
tantalum nitrides
Tantalum
Silicon
Polysilicon
silicon nitrides
7 Citations

Measurement of hydroxyl radicals in wafer cleaning solutions irradiated with megasonic waves

Keswani, M., Raghavan, S., Govindarajan, R. & Brown, I. Apr 25 2014 In : Microelectronic Engineering. 118, p. 61-65 5 p.

Research output: Contribution to journalArticle

hydroxyl radicals
Hydroxyl Radical
cleaning
Cleaning
wafers
1 Citations

Role of ammonia and carbonates in scavenging hydroxyl radicals generated during megasonic irradiation of wafer cleaning solutions

Balachandran, R., Zhao, M., Dong, B., Brown, I., Raghavan, S. & Keswani, M. Nov 25 2014 In : Microelectronic Engineering. 130, p. 82-86 5 p.

Research output: Contribution to journalArticle

Carbonates
Scavenging
scavenging
hydroxyl radicals
Ammonia
2013
2 Citations
cavitation flow
Electrochemical impedance spectroscopy
Cavitation
solid surfaces
cleaning
4 Citations

A study of hydrogen peroxide decomposition in ammonia-peroxide mixtures (APM)

Siddiqui, S., Keswani, M., Brooks, B., Fuerst, A. & Raghavan, S. Feb 2013 In : Microelectronic Engineering. 102, p. 68-73 6 p.

Research output: Contribution to journalArticle

Peroxides
peroxides
hydrogen peroxide
Ammonia
Hydrogen peroxide
15 Citations
cavitation flow
Cavitation
Cyclic voltammetry
Gases
cleaning
15 Citations

Effect of non-ionic surfactants on transient cavitation in a megasonic field

Keswani, M., Raghavan, S. & Deymier, P. Jan 2013 In : Ultrasonics Sonochemistry. 20, 1, p. 603-609 7 p.

Research output: Contribution to journalArticle

Nonionic surfactants
cavitation flow
Cavitation
Surface-Active Agents
surfactants
11 Citations
blankets
Ammonia
cleaning
ammonia
Cleaning
1 Citations

New plasmonic materials in visible spectrum through electrical charging

Cao, J., Balachandran, R., Keswani, M., Muralidharan, K., Laref, S., Ziolkowski, R., Runge, K., Deymier, P., Raghavan, S. & Miyawaki, M. 2013 Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8632, 86321I

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasmonics
visible spectrum
engineers
charging
permittivity
7 Citations

Post-etch residue removal using choline chloride-malonic acid deep eutectic solvent (DES)

Taubert, J., Keswani, M. & Raghavan, S. Feb 2013 In : Microelectronic Engineering. 102, p. 81-86 6 p.

Research output: Contribution to journalArticle

choline
Choline
eutectics
Eutectics
chlorides

Use of a simple cavitation cell set-up with replaceable single band filters for analysis of sonoluminescence signal from megasonic irradiated gasified aqueous solutions

Han, Z., Keswani, M., Liebscher, E., Beck, M. & Raghavan, S. 2013 ECS Transactions. 6 ed. Electrochemical Society Inc., Vol. 58, p. 69-76 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sonoluminescence
Cavitation
Ammonium hydroxide
Photomultipliers
Fused silica
2012
1 Citations

Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions

Pandit, V., Keswani, M., Siddiqui, S. & Raghavan, S. 2012 Solid State Phenomena. Trans Tech Publications Ltd, Vol. 187, p. 159-162 4 p. (Solid State Phenomena; vol. 187)

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ammonium Hydroxide
Ammonium hydroxide
Fused silica
Gold
Oxides
1 Citations

Control of sonoluminescence in carbon dioxide containing DI water at near neutral pH conditions

Kumari, S., Keswani, M., Singh, S. K., Beck, M., Leibscher, E., Deymier, P. & Raghavan, S. 2012 Solid State Phenomena. Trans Tech Publications Ltd, Vol. 187, p. 177-180 4 p. (Solid State Phenomena; vol. 187)

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sonoluminescence
sonoluminescence
Carbon Dioxide
carbon dioxide
Carbon dioxide
2 Citations

Dynamics of interactions between HF and hafnium oxide during surface preparation of high-k dielectrics

Zamani, D., Keswani, M., Mahdavi, O., Yan, J., Raghavan, S. & Shadman, F. 2012 In : IEEE Transactions on Semiconductor Manufacturing. 25, 3, p. 511-515 5 p., 6189800

Research output: Contribution to journalArticle

Hafnium oxides
hafnium oxides
Quartz crystal microbalances
quartz crystals
microbalances
Peroxides
peroxides
hydrogen peroxide
Hydrogen peroxide
pretreatment
3 Citations
choline
Choline
ureas
Urea
eutectics
2011
19 Citations

Control of sonoluminescence signal in deionized water using carbon dioxide

Kumari, S., Keswani, M., Singh, S., Beck, M., Liebscher, E., Deymier, P. & Raghavan, S. Dec 2011 In : Microelectronic Engineering. 88, 12, p. 3437-3441 5 p.

Research output: Contribution to journalArticle

Sonoluminescence
sonoluminescence
Deionized water
Carbon Dioxide
carbon dioxide
1 Citations

Determining the fundamental kinetic parameters for rinsing and cleaning of hafnium-based high-k materials

Zamani, D., Keswani, M., Yan, J., Raghavan, S. & Shadman, F. 2011 ECS Transactions. 5 ed. Vol. 41, p. 45-50 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hafnium
Quartz crystal microbalances
Kinetic parameters
Cleaning
Desorption
17 Citations

Effect of dissolved CO 2 in de-ionized water in reducing wafer damage during megasonic cleaning in MegPie®

Kumari, S., Keswani, M., Singh, S., Beck, M., Liebscher, E., Toan, L. Q. & Raghavan, S. 2011 ECS Transactions. 5 ed. Vol. 41, p. 93-99 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
Acoustic waves
Water
Sonoluminescence
Irradiation
3 Citations

Electrochemical mechanical removal of Ta films in dihydroxybenzene sulfonic acid solutions containing potassium iodate

Govindarajan, R., Siddiqui, S., Keswani, M., Raghavan, S., Singh, D. R. P. & Chawla, N. 2011 In : Electrochemical and Solid-State Letters. 14, 4

Research output: Contribution to journalArticle

iodates
Sulfonic Acids
sulfonic acid
Potassium
potassium
3 Citations

Investigation of galvanic corrosion characteristics between tantalum nitride and poly silicon in dilute hf solutions

Govindarajan, R., Keswani, M. & Raghavan, S. 2011 ECS Transactions. 5 ed. Vol. 41, p. 15-21 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tantalum
Nitrides
Corrosion
Polysilicon
Silicon