• 294 Citations
  • 9 h-Index
20062018
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Research Output 2006 2018

  • 294 Citations
  • 9 h-Index
  • 45 Article
  • 16 Conference contribution
  • 3 Chapter
  • 1 Review article
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Chapter
2016

Brush Scrubbing for Post-CMP Cleaning

Sun, T., Han, Z. & Keswani, M., Nov 11 2016, Methods for Surface Cleaning. Elsevier Inc., Vol. 9, p. 109-133 25 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Chemical mechanical polishing
Brushes
Cleaning
Polyvinyl Alcohol
Polyvinyl alcohols
2015
1 Citations

Megasonic Cleaning for Particle Removal

Keswani, M., Balachandran, R. & Deymier, P. Feb 6 2015 Particle Adhesion and Removal. wiley, p. 243-279 37 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Cleaning
Cavitation
Acoustic streaming
Acoustic fields
Liquids
2011
1 Citations

Surface and Colloidal Chemical Aspects of Wet Cleaning

Raghavan, S., Keswani, M. & Venkataraman, N. Feb 22 2011 Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications. John Wiley and Sons, p. 3-37 35 p.

Research output: Chapter in Book/Report/Conference proceedingChapter

Cleaning
Drying
Chemical cleaning
Zeta potential
Nitrides