Research Output 2006 2018

  • 230 Citations
  • 8 h-Index
  • 39 Article
  • 16 Conference contribution
  • 3 Chapter
  • 1 Review article
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Conference contribution
2016

Acoustic characterization of two megasonic devices for photomask cleaning

Zanelli, C., Giridhar, D., Keswani, M., Okada, N., Hsu, J. & Yam, P. 2016 Photomask Technology 2016. SPIE, Vol. 9985, 998524

Research output: ResearchConference contribution

Characterization of cavitation in a single wafer or photomask cleaning tool

Chen, X., Yam, P., Keswani, M., Okada, N. & Zanelli, C. I. 2016 Ultra Clean Processing of Semiconductor Surfaces XIII. Trans Tech Publications Ltd, Vol. 255, p. 207-212 6 p. (Solid State Phenomena; vol. 255)

Research output: ResearchConference contribution

photomasks
cavitation flow
cleaning
wafers
Photomasks
2015
1 Citations

Characterization of cavitation in ultrasonic or megasonic irradiated gas saturated solutions using a hydrophone

Zhao, M., Balachandran, R., Madigappu, P. R., Yam, P., Zanelli, C., Sierra, R. & Keswani, M. 2015 Solid State Phenomena. Trans Tech Publications Ltd, Vol. 219, p. 165-169 5 p. (Solid State Phenomena; vol. 219)

Research output: ResearchConference contribution

2013
1 Citations

New plasmonic materials in visible spectrum through electrical charging

Cao, J., Balachandran, R., Keswani, M., Muralidharan, K., Laref, S., Ziolkowski, R., Runge, K., Deymier, P., Raghavan, S. & Miyawaki, M. 2013 Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8632, 86321I

Research output: ResearchConference contribution

visible spectrum
engineers
charging
permittivity
gold
Sonoluminescence
Cavitation
Ammonium hydroxide
Photomultipliers
Fused silica
2012
1 Citations

Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions

Pandit, V., Keswani, M., Siddiqui, S. & Raghavan, S. 2012 Solid State Phenomena. Trans Tech Publications Ltd, Vol. 187, p. 159-162 4 p. (Solid State Phenomena; vol. 187)

Research output: ResearchConference contribution

Ammonium hydroxide
Fused silica
Gold
Oxides
Hot Temperature
1 Citations

Control of sonoluminescence in carbon dioxide containing DI water at near neutral pH conditions

Kumari, S., Keswani, M., Singh, S. K., Beck, M., Leibscher, E., Deymier, P. & Raghavan, S. 2012 Solid State Phenomena. Trans Tech Publications Ltd, Vol. 187, p. 177-180 4 p. (Solid State Phenomena; vol. 187)

Research output: ResearchConference contribution

Sonoluminescence
Carbon dioxide
Water
sonoluminescence
carbon dioxide
2011
1 Citations

Determining the fundamental kinetic parameters for rinsing and cleaning of hafnium-based high-k materials

Zamani, D., Keswani, M., Yan, J., Raghavan, S. & Shadman, F. 2011 ECS Transactions. 5 ed. Vol. 41, p. 45-50 6 p.

Research output: ResearchConference contribution

Hafnium
Quartz crystal microbalances
Kinetic parameters
Cleaning
Desorption
17 Citations

Effect of dissolved CO 2 in de-ionized water in reducing wafer damage during megasonic cleaning in MegPie®

Kumari, S., Keswani, M., Singh, S., Beck, M., Liebscher, E., Toan, L. Q. & Raghavan, S. 2011 ECS Transactions. 5 ed. Vol. 41, p. 93-99 7 p.

Research output: ResearchConference contribution

Cleaning
Water
Acoustic waves
Irradiation
Sonoluminescence
3 Citations

Investigation of galvanic corrosion characteristics between tantalum nitride and poly silicon in dilute hf solutions

Govindarajan, R., Keswani, M. & Raghavan, S. 2011 ECS Transactions. 5 ed. Vol. 41, p. 15-21 7 p.

Research output: ResearchConference contribution

Tantalum
Nitrides
Corrosion
Silicon
Polysilicon
2009
11 Citations

Megasonic metrology for enhanced process development

Kumari, S., Keswani, M., Beck, M., Liebscher, E., Liang, T., Deymier, P. & Raghavan, S. 2009 ECS Transactions. 5 ed. Vol. 25, p. 295-302 8 p.

Research output: ResearchConference contribution

Sonoluminescence
Cavitation
Cleaning
Acoustics
Chemical sensors
2008

Opportunities and challenges in electrochemical-mechanical planarization (ECMP)

Muthukumaran, A., Venkataraman, N., Raghavan, S. & Keswani, M. 2008 Proceedings - Electrochemical Society. Vol. PV 2008-1, p. 511-517 7 p.

Research output: ResearchConference contribution

Ruthenium
Copper
Tantalum
Cytidine Monophosphate
Metallic films
2007
7 Citations

Experimental and simulation investigations of acoustic cavitation in megasonic cleaning

Muralidharan, K., Keswani, M., Shende, H., Deymier, P., Raghavan, S., Eschbach, F. & Sengupta, A. 2007 Proceedings of SPIE - The International Society for Optical Engineering. PART 1 ed. Vol. 6517, 65171E

Research output: ResearchConference contribution

cavitation flow
cleaning
acoustics
simulation
Cavitation
2 Citations

Removal of gold particles from chromium oxynitride surface with dilute sulfuric acid solutions

Pandit, V., Keswani, M., Raghavan, S., Muralidharan, K., Deymier, P., Eshbach, F., Sengupta, A. & Yun, H. 2007 ECS Transactions. 2 ed. Vol. 11, p. 471-478 8 p.

Research output: ResearchConference contribution

Sulfuric acid
Chromium
Gold
Temperature
Surface charge
2006

Experimental and theoretical investigation of slurry chemical and mechanical characteristics in copper polishing

Zhuang, Y., Keswani, M., Borucki, L., Zhuang, R., Lacy, M., Spiro, C. & Philipossian, A. 2006 2006 Proceedings - 11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2006. p. 395-400 6 p.

Research output: ResearchConference contribution

Polishing
Copper
Flow rate
Heating
Temperature

Frictional, thermal and kinetic characterization of a novel ceria based abrasive slurry for silicon dioxide CMP

Zhuang, Y., Borucki, L., Dien, E., Ennahali, M., Michel, G., Laborie, B., Keswani, M., Rosales-Yeomans, D., Lee, H. & Philipossian, A. 2006 2006 Proceedings - 11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2006. p. 532-539 8 p.

Research output: ResearchConference contribution

Cerium compounds
Polishing
Abrasives
Silica
Kinetics