• 295 Citations
  • 9 h-Index
20062018
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Research Output 2006 2018

  • 295 Citations
  • 9 h-Index
  • 45 Article
  • 16 Conference contribution
  • 3 Chapter
  • 1 Review article
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Conference contribution
2016

Acoustic characterization of two megasonic devices for photomask cleaning

Zanelli, C., Giridhar, D., Keswani, M. K., Okada, N., Hsu, J. & Yam, P., 2016, Photomask Technology 2016. SPIE, Vol. 9985. 998524

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Characterization of cavitation in a single wafer or photomask cleaning tool

Chen, X., Yam, P., Keswani, M. K., Okada, N. & Zanelli, C. I., 2016, Ultra Clean Processing of Semiconductor Surfaces XIII. Trans Tech Publications Ltd, Vol. 255. p. 207-212 6 p. (Solid State Phenomena; vol. 255).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photomasks
photomasks
cavitation flow
Cavitation
cleaning
2015
2 Citations

Characterization of cavitation in ultrasonic or megasonic irradiated gas saturated solutions using a hydrophone

Zhao, M., Balachandran, R., Madigappu, P. R., Yam, P., Zanelli, C., Sierra Alvarez, M. R. & Keswani, M. K., 2015, Solid State Phenomena. Trans Tech Publications Ltd, Vol. 219. p. 165-169 5 p. (Solid State Phenomena; vol. 219).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hydrophones
Cavitation
Gases
Ultrasonics
2013
1 Citations

New plasmonic materials in visible spectrum through electrical charging

Cao, J., Balachandran, R., Keswani, M. K., Muralidharan, K., Laref, S., Ziolkowski, R. W., Runge, K. A., Deymier, P. A., Raghavan, S. & Miyawaki, M., 2013, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 8632. 86321I

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasmonics
visible spectrum
engineers
charging
permittivity

Use of a simple cavitation cell set-up with replaceable single band filters for analysis of sonoluminescence signal from megasonic irradiated gasified aqueous solutions

Han, Z., Keswani, M. K., Liebscher, E., Beck, M. & Raghavan, S., 2013, ECS Transactions. 6 ed. Electrochemical Society Inc., Vol. 58. p. 69-76 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sonoluminescence
Cavitation
Ammonium hydroxide
Photomultipliers
Fused silica
2012
1 Citations

Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions

Pandit, V., Keswani, M. K., Siddiqui, S. & Raghavan, S., 2012, Solid State Phenomena. Trans Tech Publications Ltd, Vol. 187. p. 159-162 4 p. (Solid State Phenomena; vol. 187).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ammonium Hydroxide
Ammonium hydroxide
Fused silica
Gold
Oxides
1 Citations

Control of sonoluminescence in carbon dioxide containing DI water at near neutral pH conditions

Kumari, S., Keswani, M. K., Singh, S. K., Beck, M., Leibscher, E., Deymier, P. A. & Raghavan, S., 2012, Solid State Phenomena. Trans Tech Publications Ltd, Vol. 187. p. 177-180 4 p. (Solid State Phenomena; vol. 187).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sonoluminescence
sonoluminescence
Carbon Dioxide
carbon dioxide
Carbon dioxide
2011
1 Citations

Determining the fundamental kinetic parameters for rinsing and cleaning of hafnium-based high-k materials

Zamani, D., Keswani, M. K., Yan, J., Raghavan, S. & Shadman, F., 2011, ECS Transactions. 5 ed. Vol. 41. p. 45-50 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hafnium
Quartz crystal microbalances
Kinetic parameters
Cleaning
Desorption
17 Citations

Effect of dissolved CO 2 in de-ionized water in reducing wafer damage during megasonic cleaning in MegPie®

Kumari, S., Keswani, M. K., Singh, S., Beck, M., Liebscher, E., Toan, L. Q. & Raghavan, S., 2011, ECS Transactions. 5 ed. Vol. 41. p. 93-99 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cleaning
Acoustic waves
Water
Sonoluminescence
Irradiation
3 Citations

Investigation of galvanic corrosion characteristics between tantalum nitride and poly silicon in dilute hf solutions

Govindarajan, R., Keswani, M. K. & Raghavan, S., 2011, ECS Transactions. 5 ed. Vol. 41. p. 15-21 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tantalum
Nitrides
Corrosion
Polysilicon
Silicon
2009
11 Citations

Megasonic metrology for enhanced process development

Kumari, S., Keswani, M. K., Beck, M., Liebscher, E., Liang, T., Deymier, P. A. & Raghavan, S., 2009, ECS Transactions. 5 ed. Vol. 25. p. 295-302 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sonoluminescence
Cavitation
Cleaning
Acoustics
Chemical sensors
2008

Opportunities and challenges in electrochemical-mechanical planarization (ECMP)

Muthukumaran, A., Venkataraman, N., Raghavan, S. & Keswani, M. K., 2008, Proceedings - Electrochemical Society. Vol. PV 2008-1. p. 511-517 7 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ruthenium
Copper
Tantalum
Cytidine Monophosphate
Metallic films
2007
8 Citations

Experimental and simulation investigations of acoustic cavitation in megasonic cleaning

Muralidharan, K., Keswani, M. K., Shende, H., Deymier, P. A., Raghavan, S., Eschbach, F. & Sengupta, A., 2007, Proceedings of SPIE - The International Society for Optical Engineering. PART 1 ed. Vol. 6517. 65171E

Research output: Chapter in Book/Report/Conference proceedingConference contribution

cavitation flow
Cavitation
cleaning
Cleaning
Acoustics
2 Citations

Removal of gold particles from chromium oxynitride surface with dilute sulfuric acid solutions

Pandit, V., Keswani, M. K., Raghavan, S., Muralidharan, K., Deymier, P. A., Eshbach, F., Sengupta, A. & Yun, H., 2007, ECS Transactions. 2 ed. Vol. 11. p. 471-478 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sulfuric acid
Chromium
Gold
Surface charge
Coulomb interactions
2006

Experimental and theoretical investigation of slurry chemical and mechanical characteristics in copper polishing

Zhuang, Y., Keswani, M. K., Borucki, L., Zhuang, R., Lacy, M., Spiro, C. & Philipossian, A., 2006, 2006 Proceedings - 11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2006. p. 395-400 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polishing
Copper
Flow rate
Heating
Slurries

Frictional, thermal and kinetic characterization of a novel ceria based abrasive slurry for silicon dioxide CMP

Zhuang, Y., Borucki, L., Dien, E., Ennahali, M., Michel, G., Laborie, B., Keswani, M. K., Rosales-Yeomans, D., Lee, H. & Philipossian, A., 2006, 2006 Proceedings - 11th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2006. p. 532-539 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cerium compounds
Polishing
Abrasives
Silica
Kinetics