• 253 Citations
  • 9 h-Index
1973 …2015

Research output per year

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Research Output

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Conference article
2001

Solutions to realistic prisoners' dilemma games

Szilagyi, M. N., Dec 1 2001, In : Proceedings of the IEEE International Conference on Systems, Man and Cybernetics. 2, p. 841-846 6 p.

Research output: Contribution to journalConference article

3 Scopus citations
1995

Improved focusing-and-deflection columns

Mui, P. H. & Szilagyi, M., Jul 1 1995, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 13, 4, p. 1496-1507 12 p.

Research output: Contribution to journalConference article

1 Scopus citations
1983

IMPROVEMENT OF ELECTROSTATIC LENSES FOR ION BEAM LITHOGRAPHY.

Szilagyi, M., Jan 1 1983, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 1, 4, p. 1137-1140 4 p.

Research output: Contribution to journalConference article

18 Scopus citations
1982

Ion beam lithography system using a high brightness H2+ ion source

Siegel, B. M., Hanson, G. R., Szilagyi, M., Thomas, D. R., Blackwell, R. J. & Paik, H., Jun 30 1982, In : Proceedings of SPIE - The International Society for Optical Engineering. 333, p. 152-157 6 p.

Research output: Contribution to journalConference article

2 Scopus citations