3 Axis homodyne displacement measuring interferometer probe for freeform optics

Michael A. Ricci, Sam C. Butler, Chen Wang, Jonathan D. Ellis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationProceedings - ASPE 2015 Annual Meeting
PublisherAmerican Society for Precision Engineering, ASPE
Pages445-450
Number of pages6
ISBN (Electronic)9781887706698
StatePublished - Jan 1 2015
Externally publishedYes
Event30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015 - Austin, United States
Duration: Nov 1 2015Nov 6 2015

Publication series

NameProceedings - ASPE 2015 Annual Meeting

Conference

Conference30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015
CountryUnited States
CityAustin
Period11/1/1511/6/15

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Ricci, M. A., Butler, S. C., Wang, C., & Ellis, J. D. (2015). 3 Axis homodyne displacement measuring interferometer probe for freeform optics. In Proceedings - ASPE 2015 Annual Meeting (pp. 445-450). (Proceedings - ASPE 2015 Annual Meeting). American Society for Precision Engineering, ASPE.