A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives

Yu Sun, Bradley J. Nelson, David P. Potasek, Eniko T Enikov

Research output: Contribution to journalArticle

137 Citations (Scopus)

Abstract

This paper presents design, fabrication and calibration results for a novel 2-DOF capacitive force sensor capable of resolving forces up to 490 μN with a resolution of 0.01 μN in x, and up to 900 μN with a resolution of 0.24 μN in y. A simple fabrication process using deep reactive ion etching (DRIE) on silicon-on-insulator (SOI) wafers forms the 3D high aspect ratio structure. A transverse mode comb drive movement is used to greatly improve device sensitivity. Among other advantages of the developed process is a dice-free release of wafer structures, allowing fragile structures to be individually packaged. Notching or footing effects and bowing effects are well-known problems in DRIE on SOI wafers. Techniques to overcome notching and bowing effects using a PlasmaTherm SLR-770 etcher are presented that do not require hardware modifications. The application of the force sensor is for providing real-time force feedback during individual cell manipulation tasks.

Original languageEnglish (US)
Pages (from-to)832-840
Number of pages9
JournalJournal of Micromechanics and Microengineering
Volume12
Issue number6
DOIs
StatePublished - Nov 2002

Fingerprint

Bending (forming)
Reactive ion etching
Silicon
Fabrication
sensors
Sensors
wafers
Aspect ratio
insulators
etching
Calibration
satellite laser ranging
Feedback
Hardware
fabrication
silicon
high aspect ratio
manipulators
ions
hardware

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)
  • Mechanics of Materials
  • Computational Mechanics

Cite this

A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives. / Sun, Yu; Nelson, Bradley J.; Potasek, David P.; Enikov, Eniko T.

In: Journal of Micromechanics and Microengineering, Vol. 12, No. 6, 11.2002, p. 832-840.

Research output: Contribution to journalArticle

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