A Novel Approach to the Synthesis of Electrostatic Lenses with Minimized Aberrations

Jeno SzÉp, Miklos Szilagyi

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

A novel approach to the synthesis of axially symmetric electrostatic lenses with minimum aberrations is presented. The method uses computer optimization to determine the electrode potentials of a multielectrode lens. The same method can be used for designing lenses for many different applications. As a preliminary result, an example of a lens with very small spherical aberration is given. The synthesis of electrostatic lenses can be accomplished automatically with an experimental setup controlled by an on-line computer.

Original languageEnglish (US)
Pages (from-to)1181-1183
Number of pages3
JournalIEEE Transactions on Electron Devices
Volume35
Issue number7
DOIs
StatePublished - Jul 1988

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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