A novel heterodyne displacement interferometer with no detectable periodic nonlinearity and optical resolution doubling

Ki Nam Joo, Jonathan D. Ellis, Eric S. Buice, Jo W. Spronck, Robert H. Munnig Schmidt

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper describes a novel heterodyne laser interferometer with no significant periodic nonlinearity for linear displacement measurements. It uses two spatially separated beams with an offset frequency and an interferometer configuration which has no mixed states to prevent polarization mixing. Moreover, the optical configurations have the benefit of doubling the measurement resolution when compared to its respective traditional counterparts. Experimental results show no discernable periodic nonlinearity for a retro-reflector interferometer and plane mirror interferometer configurations with a noise level below 20 pm.

Original languageEnglish (US)
Title of host publicationProceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
EditorsH. Van Brussel, Henny Spaan, P. Shore, Theresa Burke
Publishereuspen
Pages67-70
Number of pages4
ISBN (Electronic)9780955308284
StatePublished - Jan 1 2010
Externally publishedYes
Event10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 - Delft, Netherlands
Duration: May 31 2010Jun 4 2010

Publication series

NameProceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
Volume1

Conference

Conference10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010
CountryNetherlands
CityDelft
Period5/31/106/4/10

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Materials Science(all)
  • Environmental Engineering
  • Mechanical Engineering
  • Instrumentation

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  • Cite this

    Joo, K. N., Ellis, J. D., Buice, E. S., Spronck, J. W., & Munnig Schmidt, R. H. (2010). A novel heterodyne displacement interferometer with no detectable periodic nonlinearity and optical resolution doubling. In H. Van Brussel, H. Spaan, P. Shore, & T. Burke (Eds.), Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010 (pp. 67-70). (Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010; Vol. 1). euspen.