A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature

Jian Gu, Ravi Gupta, Chia Fu Chou, Qihuo Wei, Frederic Zenhausern

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A composite cap sealing process with precise dimension control, low pressure operation and permanent bonding at room temperatures has been demonstrated for the fabrication of 1D, 2D nanochannels (confinement in one and two dimensions, respectively), and integrated nano/microfluidic devices with a micro- to nanoscale interface. Channel size below 20 nm has been successfully sealed. Aspect ratio of < 4×10-5 has been achieved for 1D nanochannels.

Original languageEnglish (US)
Title of host publicationMicro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherJapan Academic Association Inc
Pages1193-1195
Number of pages3
StatePublished - 2006
Event10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006 - Tokyo, Japan
Duration: Nov 5 2006Nov 9 2006

Other

Other10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006
CountryJapan
CityTokyo
Period11/5/0611/9/06

Fingerprint

Microfluidics
Aspect ratio
Fabrication
Composite materials
Temperature

Keywords

  • Microchannels
  • Nano-microfluidic interface
  • Nanochannels
  • Sealing

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

Cite this

Gu, J., Gupta, R., Chou, C. F., Wei, Q., & Zenhausern, F. (2006). A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature. In Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1193-1195). Japan Academic Association Inc.

A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature. / Gu, Jian; Gupta, Ravi; Chou, Chia Fu; Wei, Qihuo; Zenhausern, Frederic.

Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Japan Academic Association Inc, 2006. p. 1193-1195.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Gu, J, Gupta, R, Chou, CF, Wei, Q & Zenhausern, F 2006, A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature. in Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Japan Academic Association Inc, pp. 1193-1195, 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006, Tokyo, Japan, 11/5/06.
Gu J, Gupta R, Chou CF, Wei Q, Zenhausern F. A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature. In Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Japan Academic Association Inc. 2006. p. 1193-1195
Gu, Jian ; Gupta, Ravi ; Chou, Chia Fu ; Wei, Qihuo ; Zenhausern, Frederic. / A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature. Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Japan Academic Association Inc, 2006. pp. 1193-1195
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