A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature

Jian Gu, Ravi Gupta, Chia Fu Chou, Qihuo Wei, Frederic Zenhausern

Research output: Contribution to conferencePaper

Abstract

A composite cap sealing process with precise dimension control, low pressure operation and permanent bonding at room temperatures has been demonstrated for the fabrication of 1D, 2D nanochannels (confinement in one and two dimensions, respectively), and integrated nano/microfluidic devices with a micro- to nanoscale interface. Channel size below 20 nm has been successfully sealed. Aspect ratio of < 4×10-5 has been achieved for 1D nanochannels.

Original languageEnglish (US)
Pages1193-1195
Number of pages3
StatePublished - Jan 1 2006
Externally publishedYes
Event10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006 - Tokyo, Japan
Duration: Nov 5 2006Nov 9 2006

Other

Other10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006
CountryJapan
CityTokyo
Period11/5/0611/9/06

Keywords

  • Microchannels
  • Nano-microfluidic interface
  • Nanochannels
  • Sealing

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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  • Cite this

    Gu, J., Gupta, R., Chou, C. F., Wei, Q., & Zenhausern, F. (2006). A simple composite cap sealing of integrated nano/microfluidic channel devices below 20 nm at room temperature. 1193-1195. Paper presented at 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006, Tokyo, Japan.