A simple polysilsesquioxane sealing of nanofluidic channels below 10 nm at room temperature

Jian Gu, Ravi Gupta, Chia Fu Chou, Qihuo Wei, Frederic Zenhausern

Research output: Contribution to journalArticle

44 Citations (Scopus)

Abstract

We present a simple sealing method to fabricate nanofluidic channels, where plasma treated polysilsesquioxane (PSQ) thin film on a rigid support is used to bond to a hydrophilic glass surface permanently at room temperature. This method shows precise dimension control below 10 nm with easy experimental setup. Using this method, one dimensional confined shallow nanochannels with a depth as small as 8 nm and an aspect ratio of <4 × 10-5, two dimensional confined nanochannel arrays, and integrated nano/microchannel devices with a micro-to-nano interface have been demonstrated. Smooth transfer of DNA fragments from microchannel to nanochannel through the interface area was observed.

Original languageEnglish (US)
Pages (from-to)1198-1201
Number of pages4
JournalLab on a Chip - Miniaturisation for Chemistry and Biology
Volume7
Issue number9
DOIs
StatePublished - 2007

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Nanofluidics
Microchannels
Temperature
Aspect ratio
DNA
Plasmas
Glass
Thin films
Equipment and Supplies
polysilsesquioxane

ASJC Scopus subject areas

  • Clinical Biochemistry

Cite this

A simple polysilsesquioxane sealing of nanofluidic channels below 10 nm at room temperature. / Gu, Jian; Gupta, Ravi; Chou, Chia Fu; Wei, Qihuo; Zenhausern, Frederic.

In: Lab on a Chip - Miniaturisation for Chemistry and Biology, Vol. 7, No. 9, 2007, p. 1198-1201.

Research output: Contribution to journalArticle

@article{c150e5695dd44ff5b02dba1c63d538c6,
title = "A simple polysilsesquioxane sealing of nanofluidic channels below 10 nm at room temperature",
abstract = "We present a simple sealing method to fabricate nanofluidic channels, where plasma treated polysilsesquioxane (PSQ) thin film on a rigid support is used to bond to a hydrophilic glass surface permanently at room temperature. This method shows precise dimension control below 10 nm with easy experimental setup. Using this method, one dimensional confined shallow nanochannels with a depth as small as 8 nm and an aspect ratio of <4 × 10-5, two dimensional confined nanochannel arrays, and integrated nano/microchannel devices with a micro-to-nano interface have been demonstrated. Smooth transfer of DNA fragments from microchannel to nanochannel through the interface area was observed.",
author = "Jian Gu and Ravi Gupta and Chou, {Chia Fu} and Qihuo Wei and Frederic Zenhausern",
year = "2007",
doi = "10.1039/b704851c",
language = "English (US)",
volume = "7",
pages = "1198--1201",
journal = "Lab on a Chip - Miniaturisation for Chemistry and Biology",
issn = "1473-0197",
publisher = "Royal Society of Chemistry",
number = "9",

}

TY - JOUR

T1 - A simple polysilsesquioxane sealing of nanofluidic channels below 10 nm at room temperature

AU - Gu, Jian

AU - Gupta, Ravi

AU - Chou, Chia Fu

AU - Wei, Qihuo

AU - Zenhausern, Frederic

PY - 2007

Y1 - 2007

N2 - We present a simple sealing method to fabricate nanofluidic channels, where plasma treated polysilsesquioxane (PSQ) thin film on a rigid support is used to bond to a hydrophilic glass surface permanently at room temperature. This method shows precise dimension control below 10 nm with easy experimental setup. Using this method, one dimensional confined shallow nanochannels with a depth as small as 8 nm and an aspect ratio of <4 × 10-5, two dimensional confined nanochannel arrays, and integrated nano/microchannel devices with a micro-to-nano interface have been demonstrated. Smooth transfer of DNA fragments from microchannel to nanochannel through the interface area was observed.

AB - We present a simple sealing method to fabricate nanofluidic channels, where plasma treated polysilsesquioxane (PSQ) thin film on a rigid support is used to bond to a hydrophilic glass surface permanently at room temperature. This method shows precise dimension control below 10 nm with easy experimental setup. Using this method, one dimensional confined shallow nanochannels with a depth as small as 8 nm and an aspect ratio of <4 × 10-5, two dimensional confined nanochannel arrays, and integrated nano/microchannel devices with a micro-to-nano interface have been demonstrated. Smooth transfer of DNA fragments from microchannel to nanochannel through the interface area was observed.

UR - http://www.scopus.com/inward/record.url?scp=34548104880&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34548104880&partnerID=8YFLogxK

U2 - 10.1039/b704851c

DO - 10.1039/b704851c

M3 - Article

C2 - 17713620

AN - SCOPUS:34548104880

VL - 7

SP - 1198

EP - 1201

JO - Lab on a Chip - Miniaturisation for Chemistry and Biology

JF - Lab on a Chip - Miniaturisation for Chemistry and Biology

SN - 1473-0197

IS - 9

ER -