A simple polysilsesquioxane sealing of nanofluidic channels below 10 nm at room temperature

Jian Gu, Ravi Gupta, Chia Fu Chou, Qihuo Wei, Frederic Zenhausern

Research output: Contribution to journalArticlepeer-review

46 Scopus citations

Abstract

We present a simple sealing method to fabricate nanofluidic channels, where plasma treated polysilsesquioxane (PSQ) thin film on a rigid support is used to bond to a hydrophilic glass surface permanently at room temperature. This method shows precise dimension control below 10 nm with easy experimental setup. Using this method, one dimensional confined shallow nanochannels with a depth as small as 8 nm and an aspect ratio of <4 × 10-5, two dimensional confined nanochannel arrays, and integrated nano/microchannel devices with a micro-to-nano interface have been demonstrated. Smooth transfer of DNA fragments from microchannel to nanochannel through the interface area was observed.

Original languageEnglish (US)
Pages (from-to)1198-1201
Number of pages4
JournalLab on a Chip
Volume7
Issue number9
DOIs
StatePublished - Jan 1 2007
Externally publishedYes

ASJC Scopus subject areas

  • Bioengineering
  • Biochemistry
  • Chemistry(all)
  • Biomedical Engineering

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