A study of hydrogen peroxide decomposition in ammonia-peroxide mixtures (APM)

S. Siddiqui, M. Keswani, B. Brooks, A. Fuerst, S. Raghavan

Research output: Contribution to journalArticle

8 Scopus citations

Abstract

The stability of ammonia-peroxide mixtures (APM) has been investigated as a function of temperature (24-65°C), dilution ratio (1:1:5-1:2:100) and Fe 2+ concentration (0-10 ppb) using an optical concentration monitor. The results show that the change in hydrogen peroxide concentration increased with an increase in temperature and Fe 2+ concentration in a four hour period. The decomposition rate of hydrogen peroxide increased with an increase in solution pH in the range of 8.0 to 9.7. The kinetic analysis of experimental data showed that the H 2O 2 decomposition reaction follows a first order kinetics with respect to both H 2O 2 and OH - concentrations. In the presence of Fe 2+, hydrogen peroxide decomposition followed a first order reaction kinetics with respect to H 2O 2 concentration. The calculated rate constant increased with an increase in temperature and Fe 2+ concentration. The apparent activation energy of H 2O 2 decomposition was calculated to be 65 ± 3 kJ/mol. In the presence of Fe 2+, the activation energy was calculated to be 50 ± 5 kJ/mol.

Original languageEnglish (US)
Pages (from-to)68-73
Number of pages6
JournalMicroelectronic Engineering
Volume102
DOIs
StatePublished - Feb 1 2013

Keywords

  • Ammonia-peroxide mixtures
  • Ammonium hydroxide loss
  • Hydrogen peroxide decomposition
  • Iron (Fe )
  • Wafer cleaning

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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