A Systematic Analysis of Symmetric Three-Electrode Electrostatic Lenses

Miklos N Szilagyi, JenÖ Szep

Research output: Contribution to journalArticle

Abstract

A thorough investigation of a class of axially symmetric three-electrode einzel lenses is given. The study is based on the analysis of axial potential distributions. Two different central/outer voltage ratios are examined. The spherical and chromatic aberration coefficients of a large class of lens models are calculated and plotted. For both voltage ratios general conclusions are drawn for the axial potential functions and electrode shapes that have small aberration coefficients. An electrostatic lens with small spherical aberration is given. General criteria are established for the design of symmetric three-electrodc lenses.

Original languageEnglish (US)
Pages (from-to)2634-2642
Number of pages9
JournalIEEE Transactions on Electron Devices
Volume34
Issue number12
DOIs
StatePublished - 1987

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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