A thermodynamic field theory for anodic bonding of micro electro-mechanical systems (MEMS)

Eniko T. Enikov, James G. Boyd

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

An anodic bond is modeled as a moving nonmaterial line forming the intersection of three material surfaces representing the unbonded conductor, the unbonded insulator, and the bonded interface. Global integral equations are written for the conservation of mass, momentum, and energy, Maxwell's equations, and the second law of thermodynamics. The global equations are then localized in the volume, the material surfaces, and the nonmaterial bond line. The second law is used to determine the thermodynamic conjugates in the thermodynamic potential and the dissipation inequality. It is demonstrated that the jump in the Poynting vector across a surface is equal to the surface Joule heating due to surface electric conduction currents.

Original languageEnglish (US)
Pages (from-to)135-158
Number of pages24
JournalInternational Journal of Engineering Science
Volume38
Issue number2
DOIs
StatePublished - Dec 10 1999
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint

Dive into the research topics of 'A thermodynamic field theory for anodic bonding of micro electro-mechanical systems (MEMS)'. Together they form a unique fingerprint.

Cite this