Acid-catalyzed dehydration for the design of chemical amplification resists

H. Ito, R. Sooriyakumaran, Y. Maekawa, Eugene A Mash

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

Chemical amplification (3) based on radiation-induced acidolysis is a very attractive approach to dramatically increasing radiation sensitivities of resist systems for use in short wavelength lithographic technologies. Polarity reversal has been also utilized in the chemical amplification scheme. In this paper is reported another approach to achieving the reverse polarity change. The chemical amplification resists described in this paper are based on acid-catalyzed dehydration of alcohols to olefins.

Original languageEnglish (US)
Title of host publicationPolymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering
PublisherPubl by ACS
Pages45-46
Number of pages2
Volume66
ISBN (Print)0841222169
StatePublished - 1992
Externally publishedYes

Fingerprint

Dehydration
Amplification
Acids
Radiation
Alkenes
Olefins
Alcohols
Wavelength

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Polymers and Plastics

Cite this

Ito, H., Sooriyakumaran, R., Maekawa, Y., & Mash, E. A. (1992). Acid-catalyzed dehydration for the design of chemical amplification resists. In Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering (Vol. 66, pp. 45-46). Publ by ACS.

Acid-catalyzed dehydration for the design of chemical amplification resists. / Ito, H.; Sooriyakumaran, R.; Maekawa, Y.; Mash, Eugene A.

Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering. Vol. 66 Publ by ACS, 1992. p. 45-46.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ito, H, Sooriyakumaran, R, Maekawa, Y & Mash, EA 1992, Acid-catalyzed dehydration for the design of chemical amplification resists. in Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering. vol. 66, Publ by ACS, pp. 45-46.
Ito H, Sooriyakumaran R, Maekawa Y, Mash EA. Acid-catalyzed dehydration for the design of chemical amplification resists. In Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering. Vol. 66. Publ by ACS. 1992. p. 45-46
Ito, H. ; Sooriyakumaran, R. ; Maekawa, Y. ; Mash, Eugene A. / Acid-catalyzed dehydration for the design of chemical amplification resists. Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering. Vol. 66 Publ by ACS, 1992. pp. 45-46
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