Acid-catalyzed pinacol rearrangement. Chemically amplified reverse polarity change

R. Sooriyakumaran, Hiroshi Ito, Eugene A. Mash

Research output: Contribution to journalConference article

Abstract

The reverse polarity change from a polar to a nonpolar state has been successfully incorporated in the design of chemical amplification resists. The imaging mechanism is based on the pinacol-pinacolone rearrangement wherein vic-diols (pinacols) are converted to ketones or aldehydes with photochemically generated acid as a catalyst. In addition to a polymeric pinacol which undergoes the rearrangement very cleanly in the solid state, aqueous base developable three-component negative deep UV resist systems are described, which are based on phenolic resins, small pinacols, and triphenylsulfonium hexafluoroantimonate as the acid generator.

Original languageEnglish (US)
Pages (from-to)419-428
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1466
StatePublished - Jan 1 1991
EventProceedings of the Eighth Conference on Advances in Resist Technology and Processing VIII - San Jose, CA, USA
Duration: Mar 4 1991Mar 5 1991

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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