Acid-catalyzed pinacol rearrangement. Chemically amplified reverse polarity change

R. Sooriyakumaran, Hiroshi Ito, Eugene A Mash

Research output: Chapter in Book/Report/Conference proceedingConference contribution

17 Citations (Scopus)

Abstract

The reverse polarity change from a polar to a nonpolar state has been successfully incorporated in the design of chemical amplification resists. The imaging mechanism is based on the pinacol-pinacolone rearrangement wherein vic-diols (pinacols) are converted to ketones or aldehydes with photochemically generated acid as a catalyst. In addition to a polymeric pinacol which undergoes the rearrangement very cleanly in the solid state, aqueous base developable three-component negative deep UV resist systems are described, which are based on phenolic resins, small pinacols, and triphenylsulfonium hexafluoroantimonate as the acid generator.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Editors Anon
PublisherPubl by Int Soc for Optical Engineering
Pages419-428
Number of pages10
Volume1466
StatePublished - 1991
Externally publishedYes
EventProceedings of the Eighth Conference on Advances in Resist Technology and Processing VIII - San Jose, CA, USA
Duration: Mar 4 1991Mar 5 1991

Other

OtherProceedings of the Eighth Conference on Advances in Resist Technology and Processing VIII
CitySan Jose, CA, USA
Period3/4/913/5/91

Fingerprint

polarity
phenolic resins
acids
Phenolic resins
Acids
Aldehydes
Ketones
aldehydes
ketones
Amplification
generators
solid state
Imaging techniques
catalysts
Catalysts

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Sooriyakumaran, R., Ito, H., & Mash, E. A. (1991). Acid-catalyzed pinacol rearrangement. Chemically amplified reverse polarity change. In Anon (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 1466, pp. 419-428). Publ by Int Soc for Optical Engineering.

Acid-catalyzed pinacol rearrangement. Chemically amplified reverse polarity change. / Sooriyakumaran, R.; Ito, Hiroshi; Mash, Eugene A.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / Anon. Vol. 1466 Publ by Int Soc for Optical Engineering, 1991. p. 419-428.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sooriyakumaran, R, Ito, H & Mash, EA 1991, Acid-catalyzed pinacol rearrangement. Chemically amplified reverse polarity change. in Anon (ed.), Proceedings of SPIE - The International Society for Optical Engineering. vol. 1466, Publ by Int Soc for Optical Engineering, pp. 419-428, Proceedings of the Eighth Conference on Advances in Resist Technology and Processing VIII, San Jose, CA, USA, 3/4/91.
Sooriyakumaran R, Ito H, Mash EA. Acid-catalyzed pinacol rearrangement. Chemically amplified reverse polarity change. In Anon, editor, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 1466. Publ by Int Soc for Optical Engineering. 1991. p. 419-428
Sooriyakumaran, R. ; Ito, Hiroshi ; Mash, Eugene A. / Acid-catalyzed pinacol rearrangement. Chemically amplified reverse polarity change. Proceedings of SPIE - The International Society for Optical Engineering. editor / Anon. Vol. 1466 Publ by Int Soc for Optical Engineering, 1991. pp. 419-428
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