Add ceramic "MEMS" to the pallet of microsystems technologies

David L. Wilcox, Jeremy W. Burdon, Rajnish Changrani, Chia Fu Chou, Steve Dai, Ramesh Koripella, Manny Oliver, Daniel Sadler, Paul Von Allmen, Frederic Zenhausern

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Just as the 40+ years of technology developments associated with the electronic application of semiconductor fabrication processes is "morphing" into a micro-electromechanical systems (MEMS) technology in the past dozen years or so, so it seems may the "mature" multilayer ceramic fabrication technology associated with capacitor components and interconnect substrates for the integrated circuit industry, be morphed into MEMS - microsystems technology applications. This paper highlights work underway in Motorola Labs aimed at exploring the potential to develop 3D multilayer ceramic structures to integrate (monolithic and hybrid) multiple functions to create microsystems for wireless, energy and life science applications. By multiple functions, we refer to the ability for a microsystems to perform electronic, fluidic, thermonic, photonic and mechatronic (or actuator) based functions. Current capabilities of the multilayer ceramic materials and processes to achieve integrated functionalities for wireless applications will be described including the development of a new dielectric enabling increased performance for wireless applications. Also to be highlighted will be exploratory microscale fuel cell prototypes exploiting advances in the multilayer ceramic lamination and feature forming technologies enabling the insertion of 3D microchannels for microfluidic functions. These prototypes also feature the ability of the technology to provide thermonic functionality for microreactor devices. Feasibility of a light source that can be integrated into the technology platform hinting at photonic applications will be described. Many materials science and engineering advancements are needed to achieve the potential of this "old" but newly "morphing" technology and some of these will be noted.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
Pages225-242
Number of pages18
Volume687
StatePublished - 2002
Externally publishedYes
EventMaterials Science of Microelectromechanical Systems (MEMS) Devices IV - Boston, MA, United States
Duration: Nov 25 2001Nov 28 2001

Other

OtherMaterials Science of Microelectromechanical Systems (MEMS) Devices IV
CountryUnited States
CityBoston, MA
Period11/25/0111/28/01

Fingerprint

Pallets
Microsystems
MEMS
Multilayers
Photonics
Fabrication
Mechatronics
Fluidics
Materials science
Ceramic materials
Microchannels
Microfluidics
Integrated circuits
Light sources
Fuel cells
Capacitors
Actuators
Semiconductor materials
Substrates

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Wilcox, D. L., Burdon, J. W., Changrani, R., Chou, C. F., Dai, S., Koripella, R., ... Zenhausern, F. (2002). Add ceramic "MEMS" to the pallet of microsystems technologies. In Materials Research Society Symposium - Proceedings (Vol. 687, pp. 225-242)

Add ceramic "MEMS" to the pallet of microsystems technologies. / Wilcox, David L.; Burdon, Jeremy W.; Changrani, Rajnish; Chou, Chia Fu; Dai, Steve; Koripella, Ramesh; Oliver, Manny; Sadler, Daniel; Von Allmen, Paul; Zenhausern, Frederic.

Materials Research Society Symposium - Proceedings. Vol. 687 2002. p. 225-242.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wilcox, DL, Burdon, JW, Changrani, R, Chou, CF, Dai, S, Koripella, R, Oliver, M, Sadler, D, Von Allmen, P & Zenhausern, F 2002, Add ceramic "MEMS" to the pallet of microsystems technologies. in Materials Research Society Symposium - Proceedings. vol. 687, pp. 225-242, Materials Science of Microelectromechanical Systems (MEMS) Devices IV, Boston, MA, United States, 11/25/01.
Wilcox DL, Burdon JW, Changrani R, Chou CF, Dai S, Koripella R et al. Add ceramic "MEMS" to the pallet of microsystems technologies. In Materials Research Society Symposium - Proceedings. Vol. 687. 2002. p. 225-242
Wilcox, David L. ; Burdon, Jeremy W. ; Changrani, Rajnish ; Chou, Chia Fu ; Dai, Steve ; Koripella, Ramesh ; Oliver, Manny ; Sadler, Daniel ; Von Allmen, Paul ; Zenhausern, Frederic. / Add ceramic "MEMS" to the pallet of microsystems technologies. Materials Research Society Symposium - Proceedings. Vol. 687 2002. pp. 225-242
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