Advanced SIL system with high NA and large tolerance

Kitak Won, Narak Choi, Jiyeon Lee, Yunsup Shin, Kyungeon Lee, Tom D. Milster, Jaihyung Lee, Jaisoon Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

To achieve high NA and large tolerance, we designed a new SIL system (Optimum SIL) which combines each advantages of the Hyper SIL and the Hemi SIL system. Also using micro-SIL system we can improve its performance. There are simulation results which support our works.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
PublisherOptical Society of America
ISBN (Print)1424411742, 9781424411740
StatePublished - Jan 1 2007
EventConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 - Seoul, Korea, Republic of
Duration: Aug 26 2007Aug 26 2007

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
CountryKorea, Republic of
CitySeoul
Period8/26/078/26/07

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Won, K., Choi, N., Lee, J., Shin, Y., Lee, K., Milster, T. D., Lee, J., & Kim, J. (2007). Advanced SIL system with high NA and large tolerance. In Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 (Optics InfoBase Conference Papers). Optical Society of America.