Advanced SIL system with high NA and large tolerance

Kitak Won, Narak Choi, Jiyeon Lee, Yunsup Shin, Kyungeon Lee, Tom D. Milster, Jaihyung Lee, Jaisoon Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

To achieve high NA and large tolerance, we designed a new SIL system (Optimum SIL) which combines each advantages of the Hyper SIL and the Hemi SIL system. Also using micro-SEL system we can improve its performance. There are simulation results which support our works.

Original languageEnglish (US)
Title of host publication2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
DOIs
StatePublished - Dec 1 2007
Event2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM - Seoul, Korea, Republic of
Duration: Aug 26 2007Aug 31 2007

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
CountryKorea, Republic of
CitySeoul
Period8/26/078/31/07

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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  • Cite this

    Won, K., Choi, N., Lee, J., Shin, Y., Lee, K., Milster, T. D., Lee, J., & Kim, J. (2007). Advanced SIL system with high NA and large tolerance. In 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM [4391108] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2007.4391108