Advanced SIL system with high NA and large tolerance

Kitak Won, Narak Choi, Jiyeon Lee, Yunsup Shin, Kyungeon Lee, Thomas D Milster, Jaihyung Lee, Jaisoon Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

To achieve high NA and large tolerance, we designed a new SIL system (Optimum SIL) which combines each advantages of the Hyper SIL and the Hemi SIL system. Also using micro-SEL system we can improve its performance. There are simulation results which support our works.

Original languageEnglish (US)
Title of host publicationPacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
DOIs
StatePublished - 2007
Event2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM - Seoul, Korea, Republic of
Duration: Aug 26 2007Aug 31 2007

Other

Other2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
CountryKorea, Republic of
CitySeoul
Period8/26/078/31/07

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Won, K., Choi, N., Lee, J., Shin, Y., Lee, K., Milster, T. D., ... Kim, J. (2007). Advanced SIL system with high NA and large tolerance. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest [4391108] https://doi.org/10.1109/CLEOPR.2007.4391108

Advanced SIL system with high NA and large tolerance. / Won, Kitak; Choi, Narak; Lee, Jiyeon; Shin, Yunsup; Lee, Kyungeon; Milster, Thomas D; Lee, Jaihyung; Kim, Jaisoon.

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2007. 4391108.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Won, K, Choi, N, Lee, J, Shin, Y, Lee, K, Milster, TD, Lee, J & Kim, J 2007, Advanced SIL system with high NA and large tolerance. in Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest., 4391108, 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM, Seoul, Korea, Republic of, 8/26/07. https://doi.org/10.1109/CLEOPR.2007.4391108
Won K, Choi N, Lee J, Shin Y, Lee K, Milster TD et al. Advanced SIL system with high NA and large tolerance. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2007. 4391108 https://doi.org/10.1109/CLEOPR.2007.4391108
Won, Kitak ; Choi, Narak ; Lee, Jiyeon ; Shin, Yunsup ; Lee, Kyungeon ; Milster, Thomas D ; Lee, Jaihyung ; Kim, Jaisoon. / Advanced SIL system with high NA and large tolerance. Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 2007.
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