All-optical excitation and detection of microelectrical-mechanical systems

J. E. Graebner, S. Pau, P. L. Gammel

Research output: Contribution to journalArticle

14 Scopus citations

Abstract

The radiation pressure of a chopped, 3 mW optical beam is used to excite angular motion of a Microelectrical-mechanical-systems' (MEMS) mirror at its resonant frequencies. The modes are identified with a scanning interferometer, providing an all-optical excitation/detection scheme. The resonant frequencies, mode distributions, spring constants, and coupling between adjacent MEMS devices can, therefore, be studied without the use of electrostatic or other types of actuation. Within the experimental error of ∼30%, the amplitude of angular oscillation is equal to the theoretical value expected for radiation pressure.

Original languageEnglish (US)
Pages (from-to)3531-3533
Number of pages3
JournalApplied Physics Letters
Volume81
Issue number19
DOIs
StatePublished - Nov 4 2002
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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