All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect

Jilin Yang, Tao Ge, Chris Summitt, Sunglin Wang, Thomas D Milster, Yuzuru Takashima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We proposed and demonstrated a new all-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect cable in which a vertical light coupler is integrated. The approach potentially cut down the cost by eliminating a metallization process for alignment of multiple masks. Throughout the process we used a polyimide as the substrate, coated by Epoclad as claddings, then AP2210B and WPR 5100 were used to fabricate waveguides and 45 degree mirror couplers, respectively. In addition, precisely aligned mirror couplers to waveguides are achieved by using polymer-based, non-metallic, and transparent phase-based alignment marks. We tested a feature specific phase-based alignment system. In addition, the shape and depth of the phase-based alignment marks are optimized for phase contrast and Schlieren imaging. Our results shows that a contrast of the image is enhanced compared to that of observed by a conventional imaging system. Such process enables to integrate polymer based waveguides by only using the polymer based alignment marks on the WPR 5100 layer. Downloading of the abstract is permitted for personal use only.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Volume9556
ISBN (Print)9781628417227
DOIs
StatePublished - 2015
EventNanoengineering: Fabrication, Properties, Optics, and Devices XII - San Diego, United States
Duration: Aug 11 2015Aug 12 2015

Other

OtherNanoengineering: Fabrication, Properties, Optics, and Devices XII
CountryUnited States
CitySan Diego
Period8/11/158/12/15

Fingerprint

Optical Interconnects
optical interconnects
Optical interconnects
Fabrication
Polymers
Alignment
alignment
Coupler
fabrication
couplers
polymers
Waveguide
Waveguides
waveguides
Mirror
Mirrors
mirrors
Polyimide
Phase Contrast
phase contrast

Keywords

  • All polymer
  • Flexible optical interconnect
  • Lithography
  • Phase contrast microscopy
  • Schlieren imaging system

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Yang, J., Ge, T., Summitt, C., Wang, S., Milster, T. D., & Takashima, Y. (2015). All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 9556). [95560F] SPIE. https://doi.org/10.1117/12.2187143

All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect. / Yang, Jilin; Ge, Tao; Summitt, Chris; Wang, Sunglin; Milster, Thomas D; Takashima, Yuzuru.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 9556 SPIE, 2015. 95560F.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yang, J, Ge, T, Summitt, C, Wang, S, Milster, TD & Takashima, Y 2015, All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 9556, 95560F, SPIE, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, San Diego, United States, 8/11/15. https://doi.org/10.1117/12.2187143
Yang J, Ge T, Summitt C, Wang S, Milster TD, Takashima Y. All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 9556. SPIE. 2015. 95560F https://doi.org/10.1117/12.2187143
Yang, Jilin ; Ge, Tao ; Summitt, Chris ; Wang, Sunglin ; Milster, Thomas D ; Takashima, Yuzuru. / All-polymer based fabrication process for an all-polymer flexible and parallel optical interconnect. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 9556 SPIE, 2015.
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