Aluminum nitride piezo-acousto-photonic crystal nanocavity with high quality factors

Linran Fan, Xi'Ankai Sun, Chi Xiong, Carsten Schuck, Hong X. Tang

Research output: Contribution to journalArticle

43 Scopus citations

Abstract

We develop a piezoelectrically actuated, one-dimensional acoustic and photonic crystal nanocavity fabricated from aluminum nitride (AlN). Through simultaneous band structure engineering in both photonic and acoustic domains, we obtain high-quality piezo-acousto-photonic crystal nanocavities with intrinsic optical Q of 1.2 × 105. The piezoelectric actuation of the confined mechanical mode at 3.18 GHz is demonstrated with mechanical Q exceeding 10 000. Such piezo-acousto-photonic crystal nanocavities will find important applications in cavity optomechanics that desire effective coupling to the electrical degree of freedom.

Original languageEnglish (US)
Article number153507
JournalApplied Physics Letters
Volume102
Issue number15
DOIs
StatePublished - Apr 15 2013
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Aluminum nitride piezo-acousto-photonic crystal nanocavity with high quality factors'. Together they form a unique fingerprint.

  • Cite this