Aluminum nitride piezo-optomechanical nanobeam cavity

Linran Fan, Xiankai Sun, Chi Xiong, Carsten Schuck, Hong X. Tang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 105 and mechanical Qm over 10,000 are obtained.

Original languageEnglish (US)
Title of host publication2013 Conference on Lasers and Electro-Optics, CLEO 2013
PublisherIEEE Computer Society
ISBN (Print)9781557529725
DOIs
StatePublished - 2013
Event2013 Conference on Lasers and Electro-Optics, CLEO 2013 - San Jose, CA, United States
Duration: Jun 9 2013Jun 14 2013

Publication series

Name2013 Conference on Lasers and Electro-Optics, CLEO 2013

Other

Other2013 Conference on Lasers and Electro-Optics, CLEO 2013
CountryUnited States
CitySan Jose, CA
Period6/9/136/14/13

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Fan, L., Sun, X., Xiong, C., Schuck, C., & Tang, H. X. (2013). Aluminum nitride piezo-optomechanical nanobeam cavity. In 2013 Conference on Lasers and Electro-Optics, CLEO 2013 [6833655] (2013 Conference on Lasers and Electro-Optics, CLEO 2013). IEEE Computer Society. https://doi.org/10.1364/cleo_si.2013.cw1f.5