Aluminum nitride piezo-optomechanical nanobeam cavity

Hong X. Tang, Linran Fan, Xiankai Sun, Chi Xiong, Carsten Schuck

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 105 and mechanical Qm over 10,000 are obtained.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2013
PagesCW1F.5
StatePublished - Nov 18 2013
Externally publishedYes
EventCLEO: Science and Innovations, CLEO_SI 2013 - San Jose, CA, United States
Duration: Jun 9 2013Jun 14 2013

Publication series

NameCLEO: Science and Innovations, CLEO_SI 2013

Other

OtherCLEO: Science and Innovations, CLEO_SI 2013
CountryUnited States
CitySan Jose, CA
Period6/9/136/14/13

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Tang, H. X., Fan, L., Sun, X., Xiong, C., & Schuck, C. (2013). Aluminum nitride piezo-optomechanical nanobeam cavity. In CLEO: Science and Innovations, CLEO_SI 2013 (pp. CW1F.5). (CLEO: Science and Innovations, CLEO_SI 2013).