An imaging microscope at 121.6nm

Weichuan Gao, Emily Finan, Byeongjoon Jeong, Geon Hee Kim, Youngsik Kim, Thomas D Milster

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Optical design and system engineering of an imaging microscope with a Lyman-a source at 121.6nm is presented. Preliminary imaging experiments and results are shown, and future implementation of the system is discussed.

Original languageEnglish (US)
Title of host publicationOptical Design and Fabrication, Freeform 2017
PublisherOSA - The Optical Society
VolumePart F50-Freeform 2017
ISBN (Electronic)9781557528209
DOIs
StatePublished - 2017
EventOptical Design and Fabrication, Freeform 2017 - Denver, United States
Duration: Jul 9 2017Jul 13 2017

Other

OtherOptical Design and Fabrication, Freeform 2017
CountryUnited States
CityDenver
Period7/9/177/13/17

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Cite this

Gao, W., Finan, E., Jeong, B., Kim, G. H., Kim, Y., & Milster, T. D. (2017). An imaging microscope at 121.6nm. In Optical Design and Fabrication, Freeform 2017 (Vol. Part F50-Freeform 2017). OSA - The Optical Society. https://doi.org/10.1364/FREEFORM.2017.JTu5A.6