An imaging microscope at 121.6nm

Weichuan Gao, Emily Finan, Byeongjoon Jeong, Geon Hee Kim, Youngsik Kim, Tom Milster

Research output: ResearchConference contribution

Abstract

Optical design and system engineering of an imaging microscope with a Lyman-a source at 121.6nm is presented. Preliminary imaging experiments and results are shown, and future implementation of the system is discussed.

LanguageEnglish (US)
Title of host publicationOptical Design and Fabrication, Freeform 2017
PublisherOSA - The Optical Society
VolumePart F50-Freeform 2017
ISBN (Electronic)9781557528209
DOIs
StatePublished - 2017
EventOptical Design and Fabrication, Freeform 2017 - Denver, United States
Duration: Jul 9 2017Jul 13 2017

Other

OtherOptical Design and Fabrication, Freeform 2017
CountryUnited States
CityDenver
Period7/9/177/13/17

Fingerprint

Microscopes
Imaging techniques
Optical design
Systems engineering
Optical systems
Experiments

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Cite this

Gao, W., Finan, E., Jeong, B., Kim, G. H., Kim, Y., & Milster, T. (2017). An imaging microscope at 121.6nm. In Optical Design and Fabrication, Freeform 2017 (Vol. Part F50-Freeform 2017). OSA - The Optical Society. DOI: 10.1364/FREEFORM.2017.JTu5A.6

An imaging microscope at 121.6nm. / Gao, Weichuan; Finan, Emily; Jeong, Byeongjoon; Kim, Geon Hee; Kim, Youngsik; Milster, Tom.

Optical Design and Fabrication, Freeform 2017. Vol. Part F50-Freeform 2017 OSA - The Optical Society, 2017.

Research output: ResearchConference contribution

Gao, W, Finan, E, Jeong, B, Kim, GH, Kim, Y & Milster, T 2017, An imaging microscope at 121.6nm. in Optical Design and Fabrication, Freeform 2017. vol. Part F50-Freeform 2017, OSA - The Optical Society, Optical Design and Fabrication, Freeform 2017, Denver, United States, 7/9/17. DOI: 10.1364/FREEFORM.2017.JTu5A.6
Gao W, Finan E, Jeong B, Kim GH, Kim Y, Milster T. An imaging microscope at 121.6nm. In Optical Design and Fabrication, Freeform 2017. Vol. Part F50-Freeform 2017. OSA - The Optical Society. 2017. Available from, DOI: 10.1364/FREEFORM.2017.JTu5A.6
Gao, Weichuan ; Finan, Emily ; Jeong, Byeongjoon ; Kim, Geon Hee ; Kim, Youngsik ; Milster, Tom. / An imaging microscope at 121.6nm. Optical Design and Fabrication, Freeform 2017. Vol. Part F50-Freeform 2017 OSA - The Optical Society, 2017.
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