An optomechanical accelerometer with a high-finesse hemispherical optical cavity

Yiliang Bao, Felipe Guzman Cervantes, Arvind Balijepalli, John R. Lawall, Jacob M. Taylor, Thomas W. Lebrun, Jason J. Gorman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

A new design for an optomechanical accelerometer is presented. The design includes a hemispherical optical cavity that can achieve high finesse and a proof mass that is well-constrained by silicon nitride beams. Based on previous work and analysis, the resolution of the accelerometer will be below 1 μg/rt-Hz. Novel MEMS fabrication processes have been developed for the accelerometer that provide optimized optical and mechanical elements. The optical cavity in the accelerometer has been characterized and a tunable laser has been locked to the cavity, thereby demonstrating the possibility for closed-loop operation of the accelerometer.

Original languageEnglish (US)
Title of host publicationIEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages105-108
Number of pages4
ISBN (Electronic)9781467369381
DOIs
StatePublished - Mar 17 2016
Externally publishedYes
Event3rd IEEE International Symposium on Inertial Sensors and Systems, ISS 2016 - Laguna Beach, United States
Duration: Feb 22 2016Feb 25 2016

Publication series

NameIEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings

Conference

Conference3rd IEEE International Symposium on Inertial Sensors and Systems, ISS 2016
CountryUnited States
CityLaguna Beach
Period2/22/162/25/16

Fingerprint

accelerometers
Accelerometers
cavities
Laser tuning
tunable lasers
Silicon nitride
silicon nitrides
microelectromechanical systems
MEMS
Fabrication
fabrication

Keywords

  • accelerometer
  • Fabry-Pérot
  • MEMS
  • Optical cavity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation
  • Aerospace Engineering

Cite this

Bao, Y., Cervantes, F. G., Balijepalli, A., Lawall, J. R., Taylor, J. M., Lebrun, T. W., & Gorman, J. J. (2016). An optomechanical accelerometer with a high-finesse hemispherical optical cavity. In IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings (pp. 105-108). [7435556] (IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISISS.2016.7435556

An optomechanical accelerometer with a high-finesse hemispherical optical cavity. / Bao, Yiliang; Cervantes, Felipe Guzman; Balijepalli, Arvind; Lawall, John R.; Taylor, Jacob M.; Lebrun, Thomas W.; Gorman, Jason J.

IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2016. p. 105-108 7435556 (IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bao, Y, Cervantes, FG, Balijepalli, A, Lawall, JR, Taylor, JM, Lebrun, TW & Gorman, JJ 2016, An optomechanical accelerometer with a high-finesse hemispherical optical cavity. in IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings., 7435556, IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 105-108, 3rd IEEE International Symposium on Inertial Sensors and Systems, ISS 2016, Laguna Beach, United States, 2/22/16. https://doi.org/10.1109/ISISS.2016.7435556
Bao Y, Cervantes FG, Balijepalli A, Lawall JR, Taylor JM, Lebrun TW et al. An optomechanical accelerometer with a high-finesse hemispherical optical cavity. In IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2016. p. 105-108. 7435556. (IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings). https://doi.org/10.1109/ISISS.2016.7435556
Bao, Yiliang ; Cervantes, Felipe Guzman ; Balijepalli, Arvind ; Lawall, John R. ; Taylor, Jacob M. ; Lebrun, Thomas W. ; Gorman, Jason J. / An optomechanical accelerometer with a high-finesse hemispherical optical cavity. IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 105-108 (IEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings).
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