An optomechanical accelerometer with a high-finesse hemispherical optical cavity

Yiliang Bao, Felipe Guzman Cervantes, Arvind Balijepalli, John R. Lawall, Jacob M. Taylor, Thomas W. Lebrun, Jason J. Gorman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

A new design for an optomechanical accelerometer is presented. The design includes a hemispherical optical cavity that can achieve high finesse and a proof mass that is well-constrained by silicon nitride beams. Based on previous work and analysis, the resolution of the accelerometer will be below 1 μg/rt-Hz. Novel MEMS fabrication processes have been developed for the accelerometer that provide optimized optical and mechanical elements. The optical cavity in the accelerometer has been characterized and a tunable laser has been locked to the cavity, thereby demonstrating the possibility for closed-loop operation of the accelerometer.

Original languageEnglish (US)
Title of host publicationIEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages105-108
Number of pages4
ISBN (Electronic)9781467369381
DOIs
StatePublished - Mar 17 2016
Externally publishedYes
Event3rd IEEE International Symposium on Inertial Sensors and Systems, ISS 2016 - Laguna Beach, United States
Duration: Feb 22 2016Feb 25 2016

Publication series

NameIEEE 3rd International Symposium on Inertial Sensors and Systems, ISS 2016 - Proceedings

Conference

Conference3rd IEEE International Symposium on Inertial Sensors and Systems, ISS 2016
CountryUnited States
CityLaguna Beach
Period2/22/162/25/16

Keywords

  • Fabry-Pérot
  • MEMS
  • Optical cavity
  • accelerometer

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation
  • Aerospace Engineering

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