Analysis of a novel slurry injection system in chemical mechanical planarization

Anand Meled, Yun Zhuang, Yasa Adi Sampurno, Siannie Theng, Yubo Jiao, Leonard Borucki, Ara Philipossian

Research output: Contribution to journalArticle

13 Scopus citations

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Physics & Astronomy

Engineering & Materials Science