Analytical model for analysis and design of V-shaped thermal microactuators

Eniko T Enikov, Shantanu S. Kedar, Kalin V. Lazarov

Research output: Contribution to journalArticle

95 Citations (Scopus)

Abstract

An analytical solution of the thermoelastic bending/budding problem of thermal microactuators is presented. V-shaped beam actuators are modeled using the theory of beam-column buckling. Axial (longitudinal) deformations including first-order nonlinear strain-displacement relations and thermal strains are included. The resulting nonlinear transcendental equations for the reaction forces are solved numerically and the solutions are compared with a nonlinear finite element (FE) model. A test actuator has also been fabricated and characterized. The obtained accuracy of the prediction is within 1.1% of the nonlinear FE solution and agrees well with the experimental data. A corresponding one-dimensional (1-D) heat transfer model has also been developed and validated against experimental i-V measurements at various temperatures. The developed analytical models are then used to analyze maximum stress and the heat transfer paths. It has been confirmed that the heat flux toward the substrate is a dominant heat dissipation route in sacrificially released devices.

Original languageEnglish (US)
Pages (from-to)788-798
Number of pages11
JournalJournal of Microelectromechanical Systems
Volume14
Issue number4
DOIs
StatePublished - Aug 2005

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Microactuators
Analytical models
Actuators
Heat transfer
Heat losses
Nonlinear equations
Buckling
Heat flux
Substrates
Temperature
Hot Temperature

Keywords

  • Beam-column theory
  • Buckling analysis
  • Thermal V-shaped actuator

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Analytical model for analysis and design of V-shaped thermal microactuators. / Enikov, Eniko T; Kedar, Shantanu S.; Lazarov, Kalin V.

In: Journal of Microelectromechanical Systems, Vol. 14, No. 4, 08.2005, p. 788-798.

Research output: Contribution to journalArticle

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