Annular surfaces in annular field systems

Research output: Contribution to journalArticle

7 Scopus citations

Abstract

We present an optical surface description that is more suitable for designing annular field systems than the standard aspheric surface representation. The use of this novel surface description leads to shorter design times and improved systems.

Original languageEnglish (US)
Pages (from-to)3401-3403
Number of pages3
JournalOptical Engineering
Volume36
Issue number12
Publication statusPublished - Dec 1997

Keywords

  • Annular fields
  • Aspheric surfaces
  • Lithography
  • Optical surfaces
  • Optical systems
  • Projection cameras
  • Reflective systems
  • Ring fields

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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