Application of maximum likelihood reconstruction of subaperture data for measurement of large flat mirrors

Peng Su, James H. Burge, Robert E. Parks

Research output: Contribution to journalArticlepeer-review

51 Scopus citations

Abstract

Interferometers accurately measure the difference between two wavefronts, one from a reference surface and the other from an unknown surface. If the reference surface is near perfect or is accurately known from some other test, then the shape of the unknown surface can be determined.We investigate the case where neither the reference surface nor the surface under test is well known. By making multiple shear measurements where both surfaces are translated and/or rotated, we obtain sufficient information to reconstruct the figure of both surfaces with a maximum likelihood reconstruction method. The method is demonstrated for the measurement of a 1:6m flat mirror to 2nm rms, using a smaller reference mirror that had significant figure error.

Original languageEnglish (US)
Pages (from-to)21-31
Number of pages11
JournalApplied optics
Volume49
Issue number1
DOIs
StatePublished - Jan 1 2010

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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