Aspheric metrology with a Shack-Hartmann wavefront sensor

John E. Greivenkamp, Daniel G. Smith, Robert O. Gappinger, Gregory A. Williby

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

Abstract

The basic problem associated with aspheric testing without the use of null optics is to obtain increased measurement range while maintaining the required measurement accuracy. Typically, the introduction of a custom-designed and fabricated null corrector has allowed the problem of aspheric testing to be reduced to that of spherical testing. Shack-Hartmann wavefront sensors have been used for adaptive optics, but have seen little application in optical metrology. We will discuss the use of a Shack-Hartmann wavefront sensor as a means of directly testing wavefronts with large aspheric departures. The Shack-Hartmann sensor provides interesting tradeoffs between measurement range, accuracy and spatial resolution. We will discuss the advantages and disadvantages of the Shack-Hartmann wavefront sensor over more conventional metrology tests. The implementation of a Shack-Hartmann wavefront sensor for aspheric testing will be shown.

Original languageEnglish (US)
Pages (from-to)1-4
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4419
DOIs
StatePublished - Dec 1 2001
Event4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications - Tandil, Argentina
Duration: Sep 3 2001Sep 7 2001

Keywords

  • Aspherics
  • Optical metrology
  • Optical testing
  • Shack-Hartmann

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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