Assessing and optimizing the performance of a phase-shifting interferometer capable of measuring the complex index of refraction and the surface profile of a test surface

Eric W. Rogala, Harrison H. Barrett

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

A novel interferometer based upon a conventional phase-shifting design is further investigated. This interferometer is capable of measuring both the real and imaginary parts of the complex index of refraction and the surface profile of a test surface. Maximum-likelihood estimation theory is shown to be an effective means of extracting the three parameters of interest from the measured data. Cramér–Rao lower bounds are introduced as a means of quantitatively assessing the performance of the system. Furthermore, it is shown that as the design parameters are optimized, the results approach the theoretical performance limit. We conclude by developing the underlying theory behind the relationship of the complex-index-of-refraction estimates to the surface-profile estimate.

Original languageEnglish (US)
Pages (from-to)1670-1685
Number of pages16
JournalJournal of the Optical Society of America A: Optics and Image Science, and Vision
Volume15
Issue number6
DOIs
StatePublished - Jun 1998

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Computer Vision and Pattern Recognition

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