Back-illuminated CCD mosaics

Michael P. Lesser, David B. Ouellette

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

One of the drawbacks of using charge-coupled devices (CCDs) for scientific imaging is their relatively small size compared to many optical systems in which they are used. Telescopes, large format cameras, and medical imaging often require detectors much larger than the few cm dimensions of modern CCDs. One solution to this problem is to closely butt several CCDs together in the focal plane of the optical system, creating a focal plane mosaic. We have developed techniques to produce back illuminated CCDs from commercial front illuminated devices for enhanced quantum efficiency and spectral coverage. In this paper we discuss our development of packages and packaging techniques to butt back illuminated CCDs together, creating mosaics of up to 64 million pixels. We have discovered several critical issues during our development of back illuminated edge-buttable CCDs which we discuss in this paper. These include the development of proper chip carriers and packages, the ability to uniformly heat the devices in the required oxidation process, the ability to uniformly match antireflection coatings for all devices in a mosaic, and the development of alternative bonding methods which allow easy bonding of edge-buttable CCDs, especially as they approach whole wafer size.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages182-188
Number of pages7
ISBN (Print)0819417629, 9780819417626
DOIs
StatePublished - Jan 1 1995
EventCharge-Coupled Devices and Solid State Optical Sensors V - San Jose, CA, USA
Duration: Feb 6 1995Feb 7 1995

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2415
ISSN (Print)0277-786X

Other

OtherCharge-Coupled Devices and Solid State Optical Sensors V
CitySan Jose, CA, USA
Period2/6/952/7/95

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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