Back-illuminated large-format Loral CCDs

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

The authors use charge-coupled devices (CCDs) from a lot of Loral wafers containing 3072 × 1024 and 800 × 1200 pixel detectors. These CCDs were specifically designed for astronomical spectrographic applications with the intention of thinning them at Steward Observatory for backside illumination. The thinning procedure and how it relates to the packaging method developed to keep the devices flat for use in fast optical beams are described. Initial results with a new oxidation procedure to allow better backside charging is also described. This oxidation method is especially effective with biased gate-charging techniques which apply a voltage directly over the backside oxide.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherPubl by Int Soc for Optical Engineering
Pages177-182
Number of pages6
Volume1447
ISBN (Print)0819405469
StatePublished - 1991
EventCharge-Coupled Devices and Solid State Optical Sensors II - San Jose, CA, USA
Duration: Feb 25 1991Feb 27 1991

Other

OtherCharge-Coupled Devices and Solid State Optical Sensors II
CitySan Jose, CA, USA
Period2/25/912/27/91

Fingerprint

Charge coupled devices
format
charging
charge coupled devices
Oxidation
oxidation
Observatories
packaging
Packaging
observatories
Lighting
Pixels
illumination
pixels
wafers
Detectors
Oxides
oxides
detectors
Electric potential

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Lesser, M. P. (1991). Back-illuminated large-format Loral CCDs. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 1447, pp. 177-182). Publ by Int Soc for Optical Engineering.

Back-illuminated large-format Loral CCDs. / Lesser, Michael P.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 1447 Publ by Int Soc for Optical Engineering, 1991. p. 177-182.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lesser, MP 1991, Back-illuminated large-format Loral CCDs. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 1447, Publ by Int Soc for Optical Engineering, pp. 177-182, Charge-Coupled Devices and Solid State Optical Sensors II, San Jose, CA, USA, 2/25/91.
Lesser MP. Back-illuminated large-format Loral CCDs. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 1447. Publ by Int Soc for Optical Engineering. 1991. p. 177-182
Lesser, Michael P. / Back-illuminated large-format Loral CCDs. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 1447 Publ by Int Soc for Optical Engineering, 1991. pp. 177-182
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