Beam aberration analysis of differential wavefront interferometry

Xiangzhi Yu, Steven R. Gillmer, Chen Wang, Jonathan D. Ellis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
Original languageEnglish (US)
Title of host publicationProceedings - ASPE 2014 Annual Meeting
PublisherAmerican Society for Precision Engineering, ASPE
Pages412-416
Number of pages5
ISBN (Electronic)9781887706667
StatePublished - Jan 1 2014
Externally publishedYes
Event29th Annual Meeting of the American Society for Precision Engineering, ASPE 2014 - Boston, United States
Duration: Nov 9 2014Nov 14 2014

Publication series

NameProceedings - ASPE 2014 Annual Meeting

Conference

Conference29th Annual Meeting of the American Society for Precision Engineering, ASPE 2014
CountryUnited States
CityBoston
Period11/9/1411/14/14

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Yu, X., Gillmer, S. R., Wang, C., & Ellis, J. D. (2014). Beam aberration analysis of differential wavefront interferometry. In Proceedings - ASPE 2014 Annual Meeting (pp. 412-416). (Proceedings - ASPE 2014 Annual Meeting). American Society for Precision Engineering, ASPE.