Beam geometry, alignment, and wavefront aberration effects on interferometric differential wavefront sensing

Xiangzhi Yu, S. R. Gillmer, J. D. Ellis

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Heterodyne interferometry is a widely accepted methodology with high resolution in many metrology applications. As a functionality enhancement, differential wavefront sensing (DWS) enables simultaneous measurement of displacement, pitch, and yaw using a displacement interferometry system and a single beam incident on a plane mirror target. The angular change is measured using a weighted phase average between symmetrically adjacent quadrant photodiode pairs. In this paper, we present an analytical model to predict the scaling of differential phase signals based on fundamental Gaussian beams. Several numerical models are presented to discuss the effects of physical beam parameters, detector size, system alignment errors, and beam wavefront aberrations on the DWS technique. The results of our modeling predict rotational scaling factors and a usable linear range. Furthermore, experimental results show the analytically predicted scaling factor is in good agreement with empirical calibration. Our three degree-of-freedom interferometer can achieve a resolution of 0.4 nm in displacement and 0.2 μrad in pitch and yaw simultaneously.

Original languageEnglish (US)
Article number125203
JournalMeasurement Science and Technology
Volume26
Issue number12
DOIs
StatePublished - Nov 27 2015
Externally publishedYes

Fingerprint

Wavefront Sensing
Wavefronts
Aberrations
Aberration
Wave Front
aberration
Alignment
Scaling Factor
alignment
Interferometry
yaw
Geometry
Heterodyne Interferometry
geometry
scaling
Predict
interferometry
Gaussian Beam
Gaussian beams
Quadrant

Keywords

  • interferometry
  • metrological instrumentation
  • optical metrology
  • stage calibration

ASJC Scopus subject areas

  • Instrumentation
  • Applied Mathematics

Cite this

Beam geometry, alignment, and wavefront aberration effects on interferometric differential wavefront sensing. / Yu, Xiangzhi; Gillmer, S. R.; Ellis, J. D.

In: Measurement Science and Technology, Vol. 26, No. 12, 125203, 27.11.2015.

Research output: Contribution to journalArticle

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