Blister-like local buckling of polysilicon microbeams during wet-release

Xin Zhang, Yitshak Zohar, Tong Yi Zhang

Research output: Contribution to conferencePaper

1 Scopus citations

Abstract

A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.

Original languageEnglish (US)
Pages379-384
Number of pages6
StatePublished - Dec 1 1998
Externally publishedYes
EventProceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition - Anaheim, CA, USA
Duration: Nov 15 1998Nov 20 1998

Other

OtherProceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition
CityAnaheim, CA, USA
Period11/15/9811/20/98

ASJC Scopus subject areas

  • Software
  • Mechanical Engineering

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    Zhang, X., Zohar, Y., & Zhang, T. Y. (1998). Blister-like local buckling of polysilicon microbeams during wet-release. 379-384. Paper presented at Proceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition, Anaheim, CA, USA, .