Blister-like local buckling of polysilicon microbeams during wet-release

Xin Zhang, Yitshak Zohar, Tong Yi Zhang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.

Original languageEnglish (US)
Title of host publicationAmerican Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC
EditorsR.J. Furness
PublisherASME
Pages379-384
Number of pages6
Volume66
Publication statusPublished - 1998
Externally publishedYes
EventProceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition - Anaheim, CA, USA
Duration: Nov 15 1998Nov 20 1998

Other

OtherProceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition
CityAnaheim, CA, USA
Period11/15/9811/20/98

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ASJC Scopus subject areas

  • Software
  • Mechanical Engineering

Cite this

Zhang, X., Zohar, Y., & Zhang, T. Y. (1998). Blister-like local buckling of polysilicon microbeams during wet-release. In R. J. Furness (Ed.), American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC (Vol. 66, pp. 379-384). ASME.