BLISTER-LIKE LOCAL BUCKLING OF POLYSILICON MICROBEAMS DURING WET-RELEASE

Xin Zhang, Yitshak Zohar, Tong Yi Zhang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.

Original languageEnglish (US)
Title of host publicationMicro-Electro-Mechanical Systems (MEMS)
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages379-384
Number of pages6
ISBN (Electronic)9780791815960
DOIs
StatePublished - 1998
EventASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998 - Anaheim, United States
Duration: Nov 15 1998Nov 20 1998

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume1998-AE

Conference

ConferenceASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998
Country/TerritoryUnited States
CityAnaheim
Period11/15/9811/20/98

ASJC Scopus subject areas

  • Mechanical Engineering

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