Broadband UV small-spot spectroscopic ellipsometer

Timothy R. Piwonka-Corle, Torsten R. Kaack, K. F. Scoffone, Xing Chen, K. B. Malwankar, Mark E. Keefer, Lloyd J LaComb, Jean Louis Stehle, Jean P. Piel, Dorian Zahorski, O. Thomas, J. P. Rey, L. Escadafals

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The design of the world's first production worthy broadband ultra-violet and visible small spot spectroscopic ellipsometer is described. The instrument, called the Prometrix UV-1250SE, was developed by the Prometrix division of Tencor Instruments in cooperation with SOPRA S.A., a pioneer in the field of spectroscopic ellipsometry. It has the ability to measure both the thickness and refractive index of different layers on a wide variety of materials in multiple layer film stacks. In this paper the optical system will be reviewed and spot size data presented. We will further discuss some of the design considerations such as the angle of incidence and allowed spread of the collection beam. Data characterizing the precision and stability of the instrument is presented for a variety of films including SiO 2 on silicon, and Si 3N 4 on silicon, and a multiple layer stack of SiO 2/poly- Si/SiO 2 on silicon.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages114-125
Number of pages12
Volume2439
StatePublished - 1995
Externally publishedYes
EventIntegrated Circuit Metrology, Inspection, and Process Control IX - Santa Clara, CA, USA
Duration: Feb 20 1995Feb 22 1995

Other

OtherIntegrated Circuit Metrology, Inspection, and Process Control IX
CitySanta Clara, CA, USA
Period2/20/952/22/95

Fingerprint

ellipsometers
broadband
Silicon
silicon
Spectroscopic ellipsometry
Polysilicon
Optical systems
division
ellipsometry
Refractive index
incidence
refractivity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Piwonka-Corle, T. R., Kaack, T. R., Scoffone, K. F., Chen, X., Malwankar, K. B., Keefer, M. E., ... Escadafals, L. (1995). Broadband UV small-spot spectroscopic ellipsometer. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 2439, pp. 114-125)

Broadband UV small-spot spectroscopic ellipsometer. / Piwonka-Corle, Timothy R.; Kaack, Torsten R.; Scoffone, K. F.; Chen, Xing; Malwankar, K. B.; Keefer, Mark E.; LaComb, Lloyd J; Stehle, Jean Louis; Piel, Jean P.; Zahorski, Dorian; Thomas, O.; Rey, J. P.; Escadafals, L.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2439 1995. p. 114-125.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Piwonka-Corle, TR, Kaack, TR, Scoffone, KF, Chen, X, Malwankar, KB, Keefer, ME, LaComb, LJ, Stehle, JL, Piel, JP, Zahorski, D, Thomas, O, Rey, JP & Escadafals, L 1995, Broadband UV small-spot spectroscopic ellipsometer. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 2439, pp. 114-125, Integrated Circuit Metrology, Inspection, and Process Control IX, Santa Clara, CA, USA, 2/20/95.
Piwonka-Corle TR, Kaack TR, Scoffone KF, Chen X, Malwankar KB, Keefer ME et al. Broadband UV small-spot spectroscopic ellipsometer. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2439. 1995. p. 114-125
Piwonka-Corle, Timothy R. ; Kaack, Torsten R. ; Scoffone, K. F. ; Chen, Xing ; Malwankar, K. B. ; Keefer, Mark E. ; LaComb, Lloyd J ; Stehle, Jean Louis ; Piel, Jean P. ; Zahorski, Dorian ; Thomas, O. ; Rey, J. P. ; Escadafals, L. / Broadband UV small-spot spectroscopic ellipsometer. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2439 1995. pp. 114-125
@inproceedings{7271eecff6174e159d1f3d4325ce5508,
title = "Broadband UV small-spot spectroscopic ellipsometer",
abstract = "The design of the world's first production worthy broadband ultra-violet and visible small spot spectroscopic ellipsometer is described. The instrument, called the Prometrix UV-1250SE, was developed by the Prometrix division of Tencor Instruments in cooperation with SOPRA S.A., a pioneer in the field of spectroscopic ellipsometry. It has the ability to measure both the thickness and refractive index of different layers on a wide variety of materials in multiple layer film stacks. In this paper the optical system will be reviewed and spot size data presented. We will further discuss some of the design considerations such as the angle of incidence and allowed spread of the collection beam. Data characterizing the precision and stability of the instrument is presented for a variety of films including SiO 2 on silicon, and Si 3N 4 on silicon, and a multiple layer stack of SiO 2/poly- Si/SiO 2 on silicon.",
author = "Piwonka-Corle, {Timothy R.} and Kaack, {Torsten R.} and Scoffone, {K. F.} and Xing Chen and Malwankar, {K. B.} and Keefer, {Mark E.} and LaComb, {Lloyd J} and Stehle, {Jean Louis} and Piel, {Jean P.} and Dorian Zahorski and O. Thomas and Rey, {J. P.} and L. Escadafals",
year = "1995",
language = "English (US)",
isbn = "0819417874",
volume = "2439",
pages = "114--125",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Broadband UV small-spot spectroscopic ellipsometer

AU - Piwonka-Corle, Timothy R.

AU - Kaack, Torsten R.

AU - Scoffone, K. F.

AU - Chen, Xing

AU - Malwankar, K. B.

AU - Keefer, Mark E.

AU - LaComb, Lloyd J

AU - Stehle, Jean Louis

AU - Piel, Jean P.

AU - Zahorski, Dorian

AU - Thomas, O.

AU - Rey, J. P.

AU - Escadafals, L.

PY - 1995

Y1 - 1995

N2 - The design of the world's first production worthy broadband ultra-violet and visible small spot spectroscopic ellipsometer is described. The instrument, called the Prometrix UV-1250SE, was developed by the Prometrix division of Tencor Instruments in cooperation with SOPRA S.A., a pioneer in the field of spectroscopic ellipsometry. It has the ability to measure both the thickness and refractive index of different layers on a wide variety of materials in multiple layer film stacks. In this paper the optical system will be reviewed and spot size data presented. We will further discuss some of the design considerations such as the angle of incidence and allowed spread of the collection beam. Data characterizing the precision and stability of the instrument is presented for a variety of films including SiO 2 on silicon, and Si 3N 4 on silicon, and a multiple layer stack of SiO 2/poly- Si/SiO 2 on silicon.

AB - The design of the world's first production worthy broadband ultra-violet and visible small spot spectroscopic ellipsometer is described. The instrument, called the Prometrix UV-1250SE, was developed by the Prometrix division of Tencor Instruments in cooperation with SOPRA S.A., a pioneer in the field of spectroscopic ellipsometry. It has the ability to measure both the thickness and refractive index of different layers on a wide variety of materials in multiple layer film stacks. In this paper the optical system will be reviewed and spot size data presented. We will further discuss some of the design considerations such as the angle of incidence and allowed spread of the collection beam. Data characterizing the precision and stability of the instrument is presented for a variety of films including SiO 2 on silicon, and Si 3N 4 on silicon, and a multiple layer stack of SiO 2/poly- Si/SiO 2 on silicon.

UR - http://www.scopus.com/inward/record.url?scp=0029425380&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029425380&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0029425380

SN - 0819417874

SN - 9780819417879

VL - 2439

SP - 114

EP - 125

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -