Broadband UV small-spot spectroscopic ellipsometer

Timothy R. Piwonka-Corle, Torsten R. Kaack, K. F. Scoffone, Xing Chen, K. B. Malwankar, Mark E. Keefer, Lloyd J. LaComb, Jean Louis Stehle, Jean P. Piel, Dorian Zahorski, O. Thomas, J. P. Rey, L. Escadafals

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The design of the world's first production worthy broadband ultra-violet and visible small spot spectroscopic ellipsometer is described. The instrument, called the Prometrix UV-1250SE, was developed by the Prometrix division of Tencor Instruments in cooperation with SOPRA S.A., a pioneer in the field of spectroscopic ellipsometry. It has the ability to measure both the thickness and refractive index of different layers on a wide variety of materials in multiple layer film stacks. In this paper the optical system will be reviewed and spot size data presented. We will further discuss some of the design considerations such as the angle of incidence and allowed spread of the collection beam. Data characterizing the precision and stability of the instrument is presented for a variety of films including SiO 2 on silicon, and Si 3N 4 on silicon, and a multiple layer stack of SiO 2/poly- Si/SiO 2 on silicon.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages114-125
Number of pages12
StatePublished - Dec 1 1995
Externally publishedYes
EventIntegrated Circuit Metrology, Inspection, and Process Control IX - Santa Clara, CA, USA
Duration: Feb 20 1995Feb 22 1995

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2439
ISSN (Print)0277-786X

Other

OtherIntegrated Circuit Metrology, Inspection, and Process Control IX
CitySanta Clara, CA, USA
Period2/20/952/22/95

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Broadband UV small-spot spectroscopic ellipsometer'. Together they form a unique fingerprint.

  • Cite this

    Piwonka-Corle, T. R., Kaack, T. R., Scoffone, K. F., Chen, X., Malwankar, K. B., Keefer, M. E., LaComb, L. J., Stehle, J. L., Piel, J. P., Zahorski, D., Thomas, O., Rey, J. P., & Escadafals, L. (1995). Broadband UV small-spot spectroscopic ellipsometer. In Proceedings of SPIE - The International Society for Optical Engineering (pp. 114-125). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2439).