Buckling evolution of microelectromechanical structures

Xin Zhang, Tong Yi Zhang, Yitshak Zohar

Research output: Contribution to journalConference article

2 Scopus citations

Abstract

This study reports in-situ observations of the buckling evolution of microelectromechanical structures during etching of their underneath sacrificial layers. As the etching went on, the buckling pattern evolved from mode I, the sinusoidal half-waves, to mode II, the constrained sinusoidal half-waves, to mode III, the conventional mode, and finally to mode IV, the blisterlike local buckling. Closed formulae were derived from theoretical analysis, and the experimental results agreed well with the theoretical ones.

Original languageEnglish (US)
Pages (from-to)155-160
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume518
StatePublished - Dec 1 1998
Externally publishedYes
EventProceedings of the 1998 MRS Spring Symposium - San Francisco, CA, USA
Duration: Apr 15 1998Apr 16 1998

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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