Buckling evolution of microelectromechanical structures

Xin Zhang, Tong Yi Zhang, Yitshak Zohar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This study reports in-situ observations of the buckling evolution of microelectromechanical structures during etching of their underneath sacrificial layers. As the etching went on, the buckling pattern evolved from mode I, the sinusoidal half-waves, to mode II, the constrained sinusoidal half-waves, to mode III, the conventional mode, and finally to mode IV, the blisterlike local buckling. Closed formulae were derived from theoretical analysis, and the experimental results agreed well with the theoretical ones.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMRS
Pages155-160
Number of pages6
Volume518
StatePublished - 1998
Externally publishedYes
EventProceedings of the 1998 MRS Spring Symposium - San Francisco, CA, USA
Duration: Apr 15 1998Apr 16 1998

Other

OtherProceedings of the 1998 MRS Spring Symposium
CitySan Francisco, CA, USA
Period4/15/984/16/98

Fingerprint

Buckling
Etching

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Zhang, X., Zhang, T. Y., & Zohar, Y. (1998). Buckling evolution of microelectromechanical structures. In Materials Research Society Symposium - Proceedings (Vol. 518, pp. 155-160). MRS.

Buckling evolution of microelectromechanical structures. / Zhang, Xin; Zhang, Tong Yi; Zohar, Yitshak.

Materials Research Society Symposium - Proceedings. Vol. 518 MRS, 1998. p. 155-160.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhang, X, Zhang, TY & Zohar, Y 1998, Buckling evolution of microelectromechanical structures. in Materials Research Society Symposium - Proceedings. vol. 518, MRS, pp. 155-160, Proceedings of the 1998 MRS Spring Symposium, San Francisco, CA, USA, 4/15/98.
Zhang X, Zhang TY, Zohar Y. Buckling evolution of microelectromechanical structures. In Materials Research Society Symposium - Proceedings. Vol. 518. MRS. 1998. p. 155-160
Zhang, Xin ; Zhang, Tong Yi ; Zohar, Yitshak. / Buckling evolution of microelectromechanical structures. Materials Research Society Symposium - Proceedings. Vol. 518 MRS, 1998. pp. 155-160
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