Buried oxide formation in low-dose low-energy SIMOX

Tula Jutarosaga, Jun Sik Jeoung, Supapan Seraphin

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)504-505
Number of pages2
JournalMicroscopy and Microanalysis
Volume9
Issue numberSUPPL. 2
StatePublished - Sep 4 2003

ASJC Scopus subject areas

  • Instrumentation

Cite this

Jutarosaga, T., Jeoung, J. S., & Seraphin, S. (2003). Buried oxide formation in low-dose low-energy SIMOX. Microscopy and Microanalysis, 9(SUPPL. 2), 504-505.