Buried oxide formation in low-dose low-energy SIMOX

Tula Jutarosaga, Jun Sik Jeoung, Supapan Seraphin

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)504-505
Number of pages2
JournalMicroscopy and Microanalysis
Volume9
Issue numberSUPPL. 2
DOIs
StatePublished - 2003

ASJC Scopus subject areas

  • Instrumentation

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