Calibration limits for interferometric measurements

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents how to quantify the measurement noises in optical surface testing. We also discussed how to apply a smoothing filter in map registration and subtraction.

Original languageEnglish (US)
Title of host publicationOptics InfoBase Conference Papers
PublisherOptical Society of America
ISBN (Print)9781557528612
StatePublished - 2008
EventOptical Fabrication and Testing, OFT 2008 - Rochester, NY, United States
Duration: Oct 21 2008Oct 24 2008

Other

OtherOptical Fabrication and Testing, OFT 2008
CountryUnited States
CityRochester, NY
Period10/21/0810/24/08

Fingerprint

Surface testing
noise measurement
subtraction
smoothing
Calibration
filters

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Zhou, P., & Burge, J. H. (2008). Calibration limits for interferometric measurements. In Optics InfoBase Conference Papers Optical Society of America.

Calibration limits for interferometric measurements. / Zhou, Ping; Burge, James H.

Optics InfoBase Conference Papers. Optical Society of America, 2008.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhou, P & Burge, JH 2008, Calibration limits for interferometric measurements. in Optics InfoBase Conference Papers. Optical Society of America, Optical Fabrication and Testing, OFT 2008, Rochester, NY, United States, 10/21/08.
Zhou P, Burge JH. Calibration limits for interferometric measurements. In Optics InfoBase Conference Papers. Optical Society of America. 2008
Zhou, Ping ; Burge, James H. / Calibration limits for interferometric measurements. Optics InfoBase Conference Papers. Optical Society of America, 2008.
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