CCD soft-X-ray detectors with improved high- and low-energy performance

B. E. Burke, J. A. Gregory, A. H. Loomis, M. Lesser, M. W. Bautz, S. E. Kissel, D. D. Rathman, R. M. Osgood, M. J. Cooper, T. A. Lind, G. R. Ricker

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Abstract

We describe results from recent enhancements to the performance of charge-coupled devices (CCDs) to both low- and high-energy soft X-rays. For improved low-energy (E < 500 eV) sensitivity, we show that a low-temperature surface treatment on back-illuminated devices results in superior energy resolution compared to that of the devices flown on Chandra, which had a more process-intensive, high-temperature treatment. For improved high-energy response, we describe a design approach for MOS CCDs that allows high substrate biases for deep depletion (up to 160 μm) and, thus, improved X-ray detection for E > 5 keV.

Original languageEnglish (US)
Pages (from-to)2322-2327
Number of pages6
JournalIEEE Transactions on Nuclear Science
Volume51
Issue number5 I
DOIs
StatePublished - Oct 1 2004

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ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Nuclear Energy and Engineering
  • Electrical and Electronic Engineering

Cite this

Burke, B. E., Gregory, J. A., Loomis, A. H., Lesser, M., Bautz, M. W., Kissel, S. E., Rathman, D. D., Osgood, R. M., Cooper, M. J., Lind, T. A., & Ricker, G. R. (2004). CCD soft-X-ray detectors with improved high- and low-energy performance. IEEE Transactions on Nuclear Science, 51(5 I), 2322-2327. https://doi.org/10.1109/TNS.2004.835901