Central aperture detection for auto direct read-write photoresist fabrication and inspection

Justin M. Sierchio, Melissa Zaverton, Lee Johnson, Victor Densmore, Thomas D Milster

Research output: Contribution to journalArticle

Abstract

We show the design for a laser scanning microscopy defect detection system based upon the idea that the light can reflect off a photoresist-laden fused-silica sample containing defects, allowing height and depth information to be obtained through changes in light intensity. Image registration using predefined points is employed. Image processing techniques involving median and deconvolution filtering are used. Results show that the 2.1-μm resolution of these defects is obtainable, and receiver operating characteristic curves are used for quantifying results. Discriminabilities of 0.73 are achieved. Preliminary results for larger-array patterns through stitching processes are also shown.

Original languageEnglish (US)
Article number084104
JournalOptical Engineering
Volume53
Issue number8
DOIs
StatePublished - 2014

Fingerprint

Photoresists
photoresists
inspection
apertures
Inspection
Fabrication
Defects
fabrication
Image registration
defects
Deconvolution
Fused silica
Microscopic examination
Image processing
Scanning
luminous intensity
image processing
Lasers
receivers
silicon dioxide

Keywords

  • central aperture
  • direct read
  • fabrication
  • inspection system
  • photoresist

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

Cite this

Central aperture detection for auto direct read-write photoresist fabrication and inspection. / Sierchio, Justin M.; Zaverton, Melissa; Johnson, Lee; Densmore, Victor; Milster, Thomas D.

In: Optical Engineering, Vol. 53, No. 8, 084104, 2014.

Research output: Contribution to journalArticle

Sierchio, Justin M. ; Zaverton, Melissa ; Johnson, Lee ; Densmore, Victor ; Milster, Thomas D. / Central aperture detection for auto direct read-write photoresist fabrication and inspection. In: Optical Engineering. 2014 ; Vol. 53, No. 8.
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