Characterization of Ge 2Sb 2Te 5 thin film alloys using conductive-tip atomic force microscopy

Chia Min Chang, Yen Ju Liu, Ming Lun Tseng, Nien Nan Chu, Ding Wei Huang, Masud Mansuripur, Din Ping Tsai

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

Conductive-tip atomic force microscopy (C-AFM) is a powerful tool for investigating the electrical characteristics of phase-change materials commonly used for electronic and optical data storage. We demonstrate the usefulness of this technique by examining the electrical conductivity of crystalline marks recorded with a focused laser pulse on a thin Ge 2Sb 2Te 5 film.

Original languageEnglish (US)
Pages (from-to)1945-1950
Number of pages6
JournalPhysica Status Solidi (B) Basic Research
Volume249
Issue number10
DOIs
StatePublished - Oct 1 2012

    Fingerprint

Keywords

  • Electronic data storage
  • Materials and process characterization
  • Optical recording
  • Phase-change materials

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this