Characterization of highly hydrophobic coatings deposited onto pre-oxidized silicon from water dispersible organosilanes

A. Marcia Almanza-Workman, Srini Raghavan, Slobodan Petrovic, Bishnu Gogoi, Pierre A Deymier, David J. Monk, Ray Roop

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

The formation and quality of highly hydrophobic coatings deposited from water dispersible organosilanes onto pre-oxidized single crystal silicon were studied using atomic force microscopy, ellipsometry, dynamic contact angle measurements and electrochemical impedance spectroscopy (EIS). Highly hydrophobic films of a commercially available water dispersible silane and two different cationic alkoxysilanes were prepared by dip coating. It was found using atomic force microscopy that, in general, the structure of these highly hydrophobic films is a continuous film with some particulates attributed to bulk polymerization of the precursor molecule in water. Film defects were quantified using EIS by the value of charge transfer resistance at the hydrofluoric acid/silicon interface. Potential applications of this type of coatings include reduction/elimination of stiction in micro-electromechanical systems, contact printing in materials microfabrication, inhibition of corrosion and oxidation, prevention of water wetting, lubrication and protein adsorption.

Original languageEnglish (US)
Pages (from-to)77-87
Number of pages11
JournalThin Solid Films
Volume423
Issue number1
DOIs
StatePublished - Jan 1 2003

Fingerprint

Silicon
coatings
Coatings
Water
silicon
Electrochemical impedance spectroscopy
water
Atomic force microscopy
atomic force microscopy
impedance
Hydrofluoric Acid
stiction
Stiction
Silanes
Hydrofluoric acid
Microfabrication
hydrofluoric acid
Ellipsometry
Angle measurement
lubrication

Keywords

  • Coating defects
  • Electrochemical impedance spectroscopy
  • Hydrophobic coatings
  • Stiction
  • Water dispersible organosilanes

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Characterization of highly hydrophobic coatings deposited onto pre-oxidized silicon from water dispersible organosilanes. / Almanza-Workman, A. Marcia; Raghavan, Srini; Petrovic, Slobodan; Gogoi, Bishnu; Deymier, Pierre A; Monk, David J.; Roop, Ray.

In: Thin Solid Films, Vol. 423, No. 1, 01.01.2003, p. 77-87.

Research output: Contribution to journalArticle

Almanza-Workman, A. Marcia ; Raghavan, Srini ; Petrovic, Slobodan ; Gogoi, Bishnu ; Deymier, Pierre A ; Monk, David J. ; Roop, Ray. / Characterization of highly hydrophobic coatings deposited onto pre-oxidized silicon from water dispersible organosilanes. In: Thin Solid Films. 2003 ; Vol. 423, No. 1. pp. 77-87.
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